ZHANG Dongqing,LIU Yanmei,WANG Ziming,ZHANG Xiaosong,LI Zhuang,CAO Fengting,FAN Qixiang,WANG Tiegang.Effects of Mo Content on Microstructure and Properties of AlCrMoSiN Coatings[J],54(1):32-41, 52 |
Effects of Mo Content on Microstructure and Properties of AlCrMoSiN Coatings |
Received:September 25, 2024 Revised:November 08, 2024 |
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DOI:10.16490/j.cnki.issn.1001-3660.2025.01.003 |
KeyWord:AlCrMoSiN coating HiPIMS pulsed DC Mo content mechanical property tribological behavior |
Author | Institution |
ZHANG Dongqing |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
LIU Yanmei |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
WANG Ziming |
Changzhou NRB Corporation, Jiangsu Changzhou , China |
ZHANG Xiaosong |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
LI Zhuang |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
CAO Fengting |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
FAN Qixiang |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
WANG Tiegang |
Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin , China |
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Abstract: |
AlCrSiN coating has broad application prospects in the field of cutting because of its high hardness and stable chemical properties. However, in the processing environment of high speed, high temperature and dry cutting, the wear resistance of the AlCrSiN coating is poor, resulting in cracks or even spalling of the coating, which seriously limits its superior performance. Therefore, it is urgent to develop a new tool coating with self-lubricating properties suitable for high temperature working environments. If a certain appropriate amount of Mo element is introduced into the AlCrSiN coating, it is expected to produce lattice distortion and strengthen the grain boundary through the replacement of Mo atoms with metal atoms in the nitride lattice, thereby improving the performance of the coating. At the same time, Mo element has the characteristic of easy oxidation at high temperature, and MoO3 lubricating films with low shear modulus can be formed during the friction process, which will effectively improve the wear resistance of the coating. However, when the content of Mo element is too high, the mechanical properties of the coating will be seriously reduced, and the coating is prone to cracking or spalling. On the contrary, when the Mo content is too low, the anti-friction effect is not obvious. In this study, the Mo content in the AlCrMoSiN coating was optimized by high power pulsed magnetron sputtering and pulsed DC magnetron sputtering composite technology. AlCrSi alloy (atomic ratio 6∶3∶1), CrMo alloy (atomic ratio 1∶4) and Cr element were used as targets . The Cr target was mainly used for bombardment cleaning and deposition of a CrN transition layer. Cemented carbide (25 mm×25 mm×3 mm), superalloy (25 mm×25 mm×2 mm) and single crystal silicon wafer (30 mm× 10 mm×0.67 mm) were used as experimental substrates. A series of AlCrMoSiN coatings with different Mo contents were developed by adjusting the sputtering power of the CrMo target (0-0.8 kW) at the deposition temperature of 400 ℃ and the deposition pressure of 1.6 Pa. The microstructure, phase composition, mechanical properties and tribological behavior of the coatings were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM), nanoindentation, nanoscratch tester and high temperature friction and wear tester. The results showed that with the increase of Mo content, the crystallinity of the AlCrMoSiN coatings increased, the grain size increased, and the coating thickness increased. The XRD diffraction peak shifted to a large angle, and the preferred orientation was obvious on the (111) and (200) crystal planes, and the structure dominated by fcc-(Al, Cr, Mo)N solid solution phases was gradually formed in the coatings. The hardness, elastic modulus and friction coefficient of the coatings decreased. The eigenvalues H/E and H3/E2 increased first and then decreased. The wear rate decreased first and then increased. When the Mo content in the coatings reached 21.3at.%, the characteristic value H/E and critical load of the coatings reached the highest, which were 0.059 and 67.62 N, respectively. The friction coefficient of the coatings under room temperature friction was 0.54, and the lowest wear rate was 7.97×10–4 µm3/(N.µm), which was one order of magnitude better than that of the AlCrSiN coatings. |
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