| JIN Yuhua,ZHANG Hengzhong,WANG Peng,ZHAO Xiaoyu,CHAI Liqiang,MA Pengjun,YU Tongtong,ZHANG Beibei.Structural, Mechanical and Tribological Properties of MoN Coatings by Different Sputtering Techniques[J],53(21):121-132 |
| Structural, Mechanical and Tribological Properties of MoN Coatings by Different Sputtering Techniques |
| Received:November 17, 2023 Revised:March 27, 2024 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.21.013 |
| KeyWord:MoN coatings sputtering power supply microstructure mechanical properties high-temperature tribology |
| Author | Institution |
| JIN Yuhua |
State Key Laboratory of Advanced Processing and Reuse of Non-ferrous Metals Jointly Established by the Ministry and Province, Lanzhou University of Technology, Lanzhou , China |
| ZHANG Hengzhong |
State Key Laboratory of Advanced Processing and Reuse of Non-ferrous Metals Jointly Established by the Ministry and Province, Lanzhou University of Technology, Lanzhou , China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| WANG Peng |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| ZHAO Xiaoyu |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| CHAI Liqiang |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| MA Pengjun |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| YU Tongtong |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
| ZHANG Beibei |
State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou , China |
|
| Hits: |
| Download times: |
| Abstract: |
| The effect of deposition conditions on the microstructure, mechanical properties, and tribological properties of MoN coatings is crucial. Whereas the sputtering technique determines the conditions under which the coating is deposited, the aim of this work is to study the differences in the structure and properties of MoN coatings by different sputtering techniques. MoN coatings were prepared on monocrystalline silicon wafers and W18Cr4V high-speed steel using RF, pulsed and medium frequency reactive magnetron sputtering techniques. The structure of the coatings was analyzed by X-ray diffraction. The elemental content of the coating was analyzed by energy spectrometer. The morphology of the coatings was analyzed by field emission scanning electron microscopy. The mechanical properties of the coatings were analyzed by scratchmeter and nanoindentation, and the tribological properties were investigated by high-temperature friction and wear testing machine. The MoN coatings prepared by the RF power supply were mainly dominated by the hexagonal phase δ-MoN phase with (200) preferential orientation, while the MoN coatings prepared by the MF DC power supply and the pulsed DC power supply were mainly dominated by the face-centered cubic phase γ-Mo2N phase with (111) preferential orientation. With the increase of nitrogen flow rate of the MoN coatings prepared by RF power supply, due to the nitriding of Mo target surface, the phenomenon of "target poisoning" occurred, resulting in a gradual decrease in the thickness of the coatings, whereas the thickness of the MoN coatings prepared by MF DC power supply and pulsed DC power supply increased with the increase of the nitrogen flow rate of the coatings in general. With the increase of nitrogen flow rate, the hardness of the MoN coatings prepared by RF power supply first increased and then decreased, with the maximum hardness of 22 GPa. The hardness of the MoN coatings prepared by MF DC power supply and pulsed DC power supply decreased gradually. This was because as the nitrogen flow rate increased, the grain size increased, reducing the grain boundary area and preventing dislocations and intergranular slip. The MoN coatings prepared by RF power supply had the highest membrane base bonding with critical load values (FLc2) reaching more than 22 N. The other two power sources prepared MoN coatings with lower membrane base bonding, the H3/E2 values of the MoN coatings prepared by RF power supply were higher than those of MF DC power supply and pulsed DC power supply, the coatings were more resistant to crack extension, and therefore, the membrane base bonding of the coatings was better than that of the coatings prepared by the other two power supplies. The hexagonal δ-MoN phase had higher hardness, modulus of elasticity and superior membrane base bonding compared with the face-centered cubic phase γ-Mo2N. At room temperature, the friction coefficients of the MoN coatings prepared by different power sources were large. At 300 ℃, β-MoO3 was detected within the wear marks, and the brittle oxide layer was prone to wear, leading to an increase in the coefficient of friction. When the temperature increased to 500 ℃, oxidation occurred on the surface of the coating, α-MoO3 dominated on the surface of the coating, the softening process of the oxides started, and the coefficient of friction decreased slowly. At a maximum temperature of 800 ℃, the coefficient of friction was reduced to about 0.4 to 0.5 because MoO3 sheared easily at high temperature. The wear rate of MoN coatings prepared by RF power supplies at elevated temperature was an order of magnitude lower than that of MF DC power supplies and pulsed DC power supplies. Sputtering technology has an important influence on the microstructure and mechanical properties of MoN coatings. The MoN coatings prepared by RF power supply present optimal mechanical and tribological properties. |
| Close |
|
|
|