ZHANG Xiaokang,SHI Chenchun,YE Wenbin,FANG Hao,LI Jinbang,YU Aibing.Tribological Properties of Polishing Pads by Surface Texturing[J],53(21):97-111 |
Tribological Properties of Polishing Pads by Surface Texturing |
Received:November 14, 2023 Revised:February 26, 2024 |
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DOI:10.16490/j.cnki.issn.1001-3660.2024.21.011 |
KeyWord:surface texturing polishing pad wear resistance friction material removal abrasive particle |
Author | Institution |
ZHANG Xiaokang |
School of Mechanical Engineering and Mechanics, Ningbo University, Zhejiang Ningbo , China |
SHI Chenchun |
School of Mechanical Engineering and Mechanics, Ningbo University, Zhejiang Ningbo , China |
YE Wenbin |
School of Mechanical Engineering and Mechanics, Ningbo University, Zhejiang Ningbo , China |
FANG Hao |
School of Materials Science and Engineering, Hefei University of Technology, Hefei , China;Wuhu Industrial Innovation Center, Anhui Wuhu , China |
LI Jinbang |
School of Mechanical Engineering and Mechanics, Ningbo University, Zhejiang Ningbo , China |
YU Aibing |
School of Mechanical Engineering and Mechanics, Ningbo University, Zhejiang Ningbo , China |
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Abstract: |
In order to improve the service life of the polishing pad and optimize the polishing efficiency of bonnet tool, the work aims to investigate the effect of surface texturing on the tribological property of the polishing pad, and study the material removal reinforcement behavior by the textured polishing pad thoroughly. |
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