| WANG Chongyang,LIU Yanmei,YAN Bing,ZHU Jianbo,XUE Rui,XU Yuanjian,KIM Kwang，Ho,WANG Tiegang.Effect of Modulation Period on Microstructure and Properties of AlCrSiN/AlCrMoSiN Multilayered Coatings[J],53(15):57-67 |
| Effect of Modulation Period on Microstructure and Properties of AlCrSiN/AlCrMoSiN Multilayered Coatings |
| Received:September 21, 2023 Revised:November 28, 2023 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.15.005 |
| KeyWord:magnetron sputtering multilayered coating AlCrSiN/AlCrMoSiN modulation period tribological behavior |
| Author | Institution |
| WANG Chongyang |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| LIU Yanmei |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| YAN Bing |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| ZHU Jianbo |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| XUE Rui |
Tianjin TANHAS Technology Co., Ltd., Tianjin , China |
| XU Yuanjian |
Tianjin Yasheng Industrial Technology Co., Ltd., Tianjin , China |
| KIM Kwang，Ho |
Global Frontier R&D Center for Hybrid Interface Materials, Pusan National University, Busan 609-735, The Republic of Korea |
| WANG Tiegang |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
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| Abstract: |
| AlCrSiN coatings with exceptional oxidation resistance and remarkable mechanical properties are often used as promising protective layers on cutting tool surfaces. Due to their inferior frictional properties at elevated temperatures, AlCrSiN coatings are unable to meet the machining requirements at higher cutting speed. The addition of Mo element is an effective method to reduce friction because MoO3 lubricating phases could be generated during the friction contact. In this work, the AlCrMoSiN layer was implanted periodically into the AlCrSiN coatings to be used as solid lubricant. A series of AlCrSiN/AlCrMoSiN multilayers with different modulation periods were prepared by high power impulse magnetron sputtering and pulsed DC magnetron sputtering hybrid techniques. The modulation ratio in all the multilayered coatings was 5∶1, namely the layer thickness ratio of AlCrSiN and AlCrMoSiN in each cycle was 5∶1. Through regulating the heterogeneous interfaces of the multilayers, the mechanical and tribological properties of the AlCrSiN/AlCrMoSiN multilayers were improved, and the service life and machining efficiency of coated carbide tools were also increased. The polished cemented carbide sheets with a shape of 25 mm×25 mm×3 mm were used as the substrates. They were washed and dried with anhydrous ethanol and were fixed on the holder into the vacuum chamber. The hybrid magnetron sputtering equipment made in Dalian V-TECH was used to fabricate the AlCrSiN/AlCrMoSiN multilayered coatings. During the deposition process, the deposition temperature was set to 400 ℃, the working pressure was 0.6 Pa, and the N2 flow rate was 200 cm3/min The sputtering power of target AlCrSi (atomic ratio 6∶3∶1) and CrMo (atomic ratio 55∶45) were set to 1.2 kW and 0.4 kW, respectively. The surface morphology, chemical composition, hardness, elastic modulus, friction coefficient, and wear rate of the AlCrSiN/AlCrMoSiN multilayered coatings were tested by SEM, XRD, TEM, nano-indenter, and tribometer, respectively. After the friction tests, XPS was employed to analyze the chemical valence states of Mo element on the worn surface. The results showed that the AlCrMoSiN layer contained a large amount of amorphous phases due to doping Mo, and the coherent epitaxial growth along the AlN (111) crystal plane was observed. With the increase of the modulation period, the amount and size of macroparticles on the AlCrSiN/AlCrMoSiN multilayered coating surface became less and less. The coating surface was dense and defect free, and the top of the micro area was shaped like a "cauliflower". By TEM observation, the AlCrSiN/AlCrMoSiN multilayered coating possessed a typical nano-composite structure. The numerous multilayered interfaces impeded the grain growth, dislocation motion, and crack propagation, which resulted in the grain refinement, toughening, and strengthening. When the modulation period was 145 nm (the thickness of the AlCrSiN layer and the AlCrMoSiN layer was 120 nm and 25 nm, respectively), the AlCrSiN/AlCrMoSiN multilayered coating showed the clear interfaces. In this case, the coating hardness reached the highest, which was about 24.9 GPa. Both the friction coefficient and the wear rate were the lowest, which were 0.57 and 1.46×10−6 mm3/(Nm). The critical load arrived about 75.8 N. In conclusion, the modulation period of the multilayered coatings has an important influence on its microstructure and various properties. As the modulation period is 145 nm, the AlCrSiN/AlCrMoSiN multilayered coating presents the best comprehensive performance. |
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