| LIU Jingzhou,JU Pengfei,ZHOU Hong,XING Mingxiu,WU Guohua,ZHANG Dingyuan.Effects of C2H2 Flow Rate on Structure and Properties of Amorphous Carbon Films Prepared by Reactive Sputtering Graphite[J],53(3):113-122 |
| Effects of C2H2 Flow Rate on Structure and Properties of Amorphous Carbon Films Prepared by Reactive Sputtering Graphite |
| Received:December 26, 2022 Revised:June 14, 2023 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2024.03.011 |
| KeyWord:acetylene reactive sputtering amorphous carbon microstructure mechanical properties tribological properties |
| Author | Institution |
| LIU Jingzhou |
Shanghai Aerospace Equipment Manufacturer Co., Ltd., Shanghai , China |
| JU Pengfei |
Shanghai Aerospace Equipment Manufacturer Co., Ltd., Shanghai , China |
| ZHOU Hong |
Shanghai Aerospace Equipment Manufacturer Co., Ltd., Shanghai , China |
| XING Mingxiu |
Shanghai Aerospace Equipment Manufacturer Co., Ltd., Shanghai , China |
| WU Guohua |
Shanghai Aerospace Equipment Manufacturer Co., Ltd., Shanghai , China |
| ZHANG Dingyuan |
Shanghai Aerospace Equipment Manufacturer Co., Ltd., Shanghai , China |
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| Abstract: |
| Amorphous carbon film, which combines good chemical inertia, wear resistance and mechanical properties, has been applied in aerospace, automotive, magnetic storage, mechanical processing and other fields. sp3 ratio and H content significantly influence microstructure and tribological properties of amorphous carbon. Especially, the tribological behavior of amorphous carbon with different sp3 ratio and H content varies greatly in the run-in stage under vacuum and air, which means a lot for wear pair design in aerospace equipment components. This work aims to investigate the relationship between film structure and properties, so as to find the optimum processing window. |
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