| GU Jia-hui,WEI Dong-bo,GAO Ze-yu,LIU Jian-hua,HU Yu-jin,ZHANG Ping-ze.Research Progress on Crystal Structure, Preparation and Functional Properties of High-entropy Ceramic Thin Films[J],52(12):274-288, 314 |
| Research Progress on Crystal Structure, Preparation and Functional Properties of High-entropy Ceramic Thin Films |
| Received:September 27, 2022 Revised:March 20, 2023 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2023.12.023 |
| KeyWord:high-entropy ceramic thin films crystal structure preparation process functional properties application |
| Author | Institution |
| GU Jia-hui |
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
| WEI Dong-bo |
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
| GAO Ze-yu |
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
| LIU Jian-hua |
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
| HU Yu-jin |
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
| ZHANG Ping-ze |
College of Material Science and Technology, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
|
| Hits: |
| Download times: |
| Abstract: |
| High-entropy ceramic thin films (HECs) fabricated based on the concept of "high entropy" have excellent performance in functional applications due to their unique crystal structure and four effects, including high-entropy effect, lattice distortion effect, sluggish diffusion effect and "cocktail" effect. In this work, the crystal structures of high-entropy ceramic thin films containing different nonmetallic elements were introduced, and the affecting factors of changing the crystal structures were described. Secondly, the research progress on the functional properties of high-entropy ceramic thin films, including radiation resistance, diffusion barrier, electrocatalysis, magnetism and biocompatibility, was introduced. Finally, the shortcomings of the current research on high-entropy ceramic thin films and the future research directions of high-entropy ceramic thin films were pointed out. High-entropy ceramic thin film is a kind of compound film with better properties, such as carbides, nitrides and oxides, formed by doping C, N, O and other non-metallic elements into the high-entropy alloy film. The doping of C, N, O and other non-metallic elements in the film has a significant impact on the crystal structure of the film. For example, when there are more nitride forming elements in the film, the doping of N in the film will change the film from the original amorphous structure to the FCC structure. When there are more non nitride forming elements in the film, the film will change from the original single FCC structure or the FCC+BCC mixed structure to the amorphous structure. In addition, the parameters in the preparation process will have an impact on the crystal structure of the high-entropy ceramic thin film. For example, with the increase of substrate temperature, the adsorption capacity and surface mobility of atoms increase, and the grain size increases. The high-entropy nitride film presents a simple FCC solid solution phase. In addition, substrate bias can not directly affect the crystal structure of high-entropy ceramic thin films, but has a significant impact on the preferred orientation of the films. High-entropy ceramic thin film is expected to be a composite material with a variety of excellent properties, whether as a structural or functional material, due to its huge adjustable composition space, unique entropy effect and adjustable material properties. For example, high-entropy nitride films can be used in radiation resistant coatings and Cu interconnection diffusion barrier materials for microelectronic circuits due to their excellent radiation resistance and diffusion barrier properties. Because of its corrosion resistance and biocompatibility, high-entropy carbide films have great prospects in biomedical implant coating materials. High-entropy oxide films have excellent performance in lithium ion batteries and electronic ceramics due to their excellent electrical properties. At present, a large amount of research work on high-entropy ceramic thin films focuses on composition design, preparation process, basic properties, etc., of which the research is mostly about the high-entropy nitride films, and the research on crystal structure change rules and functional applications is less. In the future, on the one hand, the research direction should shift from the basic properties such as mechanical properties and corrosion resistance of high-entropy ceramic thin films to the special properties such as radiation resistance, diffusion barrier, electrocatalysis, magnetic properties, etc. On the other hand, the properties and applications of other high-entropy ceramic thin films should be explored except for high-entropy nitride films, high-entropy oxide films, and high-entropy carbide films. |
| Close |
|
|
|