| GU Jia-bin,LI Jian-yong,LI Liu-he,JIN Jie,ZHANG Hai-peng.Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings[J],52(9):160-169, 188 |
| Effect of Sputtering Technology on Microstructure and Mechanical Properties of TiN Coatings |
| Received:September 02, 2022 Revised:October 28, 2022 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2023.09.012 |
| KeyWord:magnetron sputtering Hybrid TiN coating microstructure mechanical properties high temperature wear property |
| Author | Institution |
| GU Jia-bin |
College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing , China |
| LI Jian-yong |
College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing , China |
| LI Liu-he |
College of Mechanical Engineering and Automation, Beihang University, Beijing , China |
| JIN Jie |
College of Mechanical, Electronic and Control Engineering,Key Laboratory of Vehicle Advanced Manufacturing, Measuring and Control Technology, Ministry of Education, Beijing Jiaotong University, Beijing , China |
| ZHANG Hai-peng |
Luoyang Bearing Research Institute Co., Ltd., Henan Luoyang , China;Henan Key Laboratory of High Performance Bearing Technology, Henan Luoyang , China |
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| Abstract: |
| The microstructure properties of TiN coating are mainly affected by the deposition conditions, which in turn are affected by the sputtering technology. The proper use of the sputtering technology allows to control the state of ion bombardment during coating growth and tailors the crystal structure, thereby improving the properties of TiN coating. Therefore, TiN coatings were deposited on the M2 high-speed steel by different sputtering technologies (dcMS, HiPMS, and Hybrid) in this work. The effects of different sputtering technologies on the microstructure, mechanical properties, and high temperature wear properties of TiN coatings were investigated. |
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