| LIU Yan-mei,ZHANG Rui,ZHU Qiang,WANG Chong-yang,BAI Wu-li-ji,CAO Feng-ting,FAN Qi-xiang,WANG Tie-gang.Effects of Deposition Temperature on AlCrSiN Coatings Prepared by Arc Ion Plating Technique[J],52(7):149-157 |
| Effects of Deposition Temperature on AlCrSiN Coatings Prepared by Arc Ion Plating Technique |
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| DOI：10.16490/j.cnki.issn.1001-3660.2023.07.012 |
| KeyWord:arc ion plating AlCrSiN coating deposition temperature friction and wear mechanical properties |
| Author | Institution |
| LIU Yan-mei |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| ZHANG Rui |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| ZHU Qiang |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China;College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing , China |
| WANG Chong-yang |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| BAI Wu-li-ji |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| CAO Feng-ting |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| FAN Qi-xiang |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
| WANG Tie-gang |
Tianjin Key Laboratory of High Speed Cutting and Precision Processing, Tianjin University of Technology and Education, Tianjin , China |
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| Abstract: |
| AlCrSiN coating deposited by PVD technique is expected to meet the application of tool coating with high temperature resistance and high temperature stability requirements for its outstanding mechanical and anti-oxidative properties. Amorphous SiNx coating can be achieved and nano-composite coating structure can be formed in AlCrSiN coating, which makes the coating have excellent mechanical performance. The formation and distribution of phases in AlCrSiN coating are significantly different due to different preparation processes, which is closely related to the ion energy in the vacuum chamber of the coating preparation equipment during the coating preparation. A series of AlCrSiN coatings were prepared at different deposition temperature by a new arc ion plating technique in this study. The arc ion plating equipment was equipped with an external coil with the function of adjusting the magnetic field strength, so the properties of AlCrSiN coating were optimized by regulating the energy in the vacuum chamber during the coating preparation process. In order to improve mechanical and tribological properties of AlCrSiN coating prepared by new arc ion plating technique, the effect of deposition temperature on the microstructure evolution and mechanical properties of AlCrSiN coating was systematically analyzed, and the effect of deposition temperature on the friction and wear properties and wear mechanism of AlCrSiN coating was also studied. The phase and texture were analyzed by XRD and the cross-sectional morphologies of coating were investigated by SEM to characterize the microstructure development in AlCrSiN coating. The results indicated that with the increase of deposition temperature, the ion kinetic energy in the vacuum chamber increased, and the deposition rate of AlCrSiN coating increased firstly and then decreased. When deposition temperature increased, Cr2N phase in the coating replaced CrN phase gradually, and hcp-AlN grew preferentially along the crystal plane. The AlCrSiN coating deposited at various deposition temperature was well bonded with the surface of monocrystalline silicon substrate and had a compact structure. The increase of deposition temperature enhanced the diffusion ability of atoms, resulting in the increase of grain size of AlCrSiN coating. Hardness, elastic modulus, adhesion and tribological properties of the above coating were evaluated by nano-indentation, scratch tester, high temperature friction tester and step tester. With the increase of preparation temperature, the hardness and elastic modulus of AlCrSiN coating increased, while H/E and H3/E2 increased firstly and then decreased, and the friction coefficient firstly decreased and then increased, which was because the coating was denser and less brittle coatings were formed in friction. When the deposition temperature was 350 ℃, the friction coefficient was the lowest, which was 0.5, and the characteristic coefficient H/E and H3/E2 of AlCrSiN coating were the highest, and the corresponding coating had the best tribological properties. When the deposition temperature rose to 450 ℃, the nano-hardness and elastic modulus of the coating were the highest, which were 25.59 GPa, 501.76 GPa respectively and the adhesion of coating was the strongest, which was 121.9 N. The microstructure of AlCrSiN coating can be adjusted by changing the deposition temperature. The prepared AlCrSiN coating is relatively dense without obvious defects such as pores, and exhibits strong adhesion and good wear resistance. The AlCrSiN coating deposited at 350 ℃ shows the lowest friction coefficient, the highest H/E and H3/E2and the best wear resistance. |
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