| CHENG Jian,YANG Zhen,LIAO Jian-fei,KONG Wei-chang,LIU Dun.Research Progress on Laser Metallization of AlN Surface[J],51(7):77-86, 149 |
| Research Progress on Laser Metallization of AlN Surface |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.07.007 |
| KeyWord:AlN laser surface modification conductive layer metallization beam profile |
| Author | Institution |
| CHENG Jian |
Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan , China |
| YANG Zhen |
Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan , China |
| LIAO Jian-fei |
Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan , China |
| KONG Wei-chang |
Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan , China |
| LIU Dun |
Center for Sino-UK Ultrafast Laser Processing Research, School of Mechanical Engineering, Hubei University of Technology, Wuhan , China |
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| Abstract: |
| This article summarizes the research development in China and beyond. Firstly, it analyzes the mechanism of AlN surface laser metallization, afterwards it reports and classifies the influence of key parameters. Simply to say, the conductive aluminum layer on the AlN surface is produced by the thermal decomposition AlN into aluminum and nitrogen duo to laser induced ultrahigh temperature. The main indicators to measure the metallization effect include the thickness and conductivity of the aluminum layer. The electrical properties of the metallic layer on AlN surface are mainly determined by laser wavelength, laser operating parameters, energy distribution and ambient atmosphere. The influence mechanism of these factors is analyzed briefly. Ultimately, some optimization measures for laser metallization are summarized in view of the defects of uneven thickness and large resistance of the metallized conductive layer in the laser metallization process. |
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