| SONG Xiao-ming,ZHANG Zhen-yu,LIU Jie,LI Yu-biao,ZHAO Shi-cheng,XU Guang-hong.Effect and Mechanism Analysis of Green Chemical Mechanical Slurry on Surface Roughness of 5083 Aluminum Alloy[J],51(5):345-353 |
| Effect and Mechanism Analysis of Green Chemical Mechanical Slurry on Surface Roughness of 5083 Aluminum Alloy |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.05.035 |
| KeyWord:5083 aluminum alloy chemical mechanical polishing green surface roughness mechanism analysis electrochemical analysis |
| Author | Institution |
| SONG Xiao-ming |
School of Mechanical Engineering, Qilu University of Technology, Jinan , China |
| ZHANG Zhen-yu |
School of Mechanical Engineering, Qilu University of Technology, Jinan , China;Dalian University of Technology, Liaoning Dalian , China |
| LIU Jie |
Dalian University of Technology, Liaoning Dalian , China |
| LI Yu-biao |
Dalian University of Technology, Liaoning Dalian , China |
| ZHAO Shi-cheng |
School of Mechanical Engineering, Qilu University of Technology, Jinan , China |
| XU Guang-hong |
Dalian University of Technology, Liaoning Dalian , China |
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| Abstract: |
| In order to improve the surface quality of 5083 aluminum alloy, an environment-friendly chemical mechanical slurry was developed, and the effect and mechanism of 5083 aluminum alloy chemical mechanical slurry on surface roughness are analyzed. Chemical mechanical polishing of aluminum alloy with green slurry. The effects of different pH regulators, pH value and H2O2 concentration on the surface roughness of aluminum alloy after CMP were analyzed. The static corrosion characteristics of 5083 aluminum alloy in different slurry were analyzed by electrochemical workstation. X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical composition changes of surface elements of 5083 aluminum alloy in different slurry. As one of the important factors in the CMP process, the slurry is mainly composed of pH regulator, abrasive particles, corrosion inhibitor and oxidant. A new type of green slurry without hazardous chemicals such as strong acid and alkali was developed. After chemical mechanical polishing, the surface roughness of 5083 aluminum alloy decreased to 0.929 nm in the scanning range of 70 μm×50 μm. The main components of the green slurry are silica abrasive particles, citric acid, hydrogen peroxide and deionized water. When the slurry does not contain H2O2, the surface roughness first decreases and then increases with the increase of pH, and the lowest surface roughness is 1.998 nm when the pH is 3.0. With the increase of H2O2 content, the surface roughness first decreases and then increases. When the mass fraction of H2O2 is 2.0wt.%, the surface roughness is at least 0.929 nm. Electrochemical test and XPS analysis show that citric acid can accelerate the corrosion of aluminum alloy by slurry, and H2O2 can form an oxide layer on the surface of aluminum alloy, thus slowing down the corrosion of aluminum alloy by slurry. The main components of the oxide film are Al2O3, AlOOH and Al(OH)3. |
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