| ZHANG Ren-jie,ZHANG Zhen-yu,LI Yu-biao,XU Guang-hong,CUI Xiang-xiang,LIU Jie.Green Chemical Mechanical Polishing of 304 Stainless Steel[J],51(5):325-335 |
| Green Chemical Mechanical Polishing of 304 Stainless Steel |
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| DOI：10.16490/j.cnki.issn.1001-3660.2022.05.033 |
| KeyWord:304 stainless steel chemical mechanical polishing green environmental protection orthogonal test chemical reaction mechanism surface roughness |
| Author | Institution |
| ZHANG Ren-jie |
School of Mechanical Engineering, Qilu University of Technology, Jinan , China |
| ZHANG Zhen-yu |
School of Mechanical Engineering, Qilu University of Technology, Jinan , China;Dalian University of Technology, Liaoning Dalian , China |
| LI Yu-biao |
Dalian University of Technology, Liaoning Dalian , China |
| XU Guang-hong |
Dalian University of Technology, Liaoning Dalian , China |
| CUI Xiang-xiang |
Dalian University of Technology, Liaoning Dalian , China |
| LIU Jie |
Dalian University of Technology, Liaoning Dalian , China |
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| Abstract: |
| Improving the surface polishing quality of 304 stainless steel by adopting an environment-friendly polishing process. In this paper, based on the chemical mechanical polishing (CMP) process, a green and environmentally friendly polishing slurry with the main components of aluminum oxide (Al2O3) abrasive, L-malic acid, hydrogen peroxide (H2O2), emulsifier OP-10 and glycine is used. A four-factor, four-level orthogonal CMP experiment was designed and tested for pH, H2O2, emulsifier OP-10, and glycine mass fraction. The effects of the four factors on surface roughness (Ra) and material removal rate were analyzed using the polar difference method. The electrochemical workstation was used to analyze the static corrosion characteristics of 304 stainless steel under different polishing slurry environments by the dynamic potential polarization curve method. Through the analysis of corrosion potential and corrosion current density, to investigate the degree of corrosion of 304 stainless steel by different polishing slurry. The changes of surface elements and chemical components of 304 stainless steel in different polishing solutions were analyzed by X-ray photoelectron spectroscopy (XPS). Through the analysis of narrow spectra of Fe 2p and O 1s, the composition changes of iron and oxygen on the surface of 304 stainless steel in different polishing solutions were explored. A new environment-friendly chemical mechanical polishing slurry without any strong acid, alkali or dangerous chemicals was developed in this paper. Through green CMP processing, the average surface roughness of 304 stainless steel was reduced from 7.972 nm before CMP to 0.543 nm. To the best of our knowledge, surface roughness after green CMP developed are the lowest on 304 stainless steel, compared with those reported previously. The optimal polishing slurry parameters for green CMP processing were obtained by orthogonal tests:pH=3, 0.3wt.% H2O2, 0.3wt.% emulsifier OP-10, 1.5wt.% glycine. XPS and electrochemical analysis show that L-malic acid and glycine promote each other and enhance the corrosiveness of the polishing slurry. On the contrary, H2O2 can enhance the oxidation of the polishing slurry and slow down the corrosion of the polishing slurry on the surface of 304 stainless steel. |
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