| LIU Feng,GUO Xu-hong,HAN Yu-jie,WANG Cheng-dong,LIU Tong-shun,DONG Bang-zhu,ZHANG Ke-dong.Study on Fabrication Method of Micro-textures on Cemented Carbide Surface Based on Ion Beam Etching-assisted Laser[J],50(4):103-112 |
| Study on Fabrication Method of Micro-textures on Cemented Carbide Surface Based on Ion Beam Etching-assisted Laser |
| Received:July 07, 2020 Revised:August 12, 2020 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2021.04.010 |
| KeyWord:ion beam etching (IBE)-assisted laser processing WC/Co cemented carbide pit-type micro-textures processing parameters surface topography profile evolution model |
| Author | Institution |
| LIU Feng |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
| GUO Xu-hong |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
| HAN Yu-jie |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
| WANG Cheng-dong |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
| LIU Tong-shun |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
| DONG Bang-zhu |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
| ZHANG Ke-dong |
Department of Mechanical and Electrical Engineering, Soochow University, Suzhou , China |
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| Abstract: |
| To solve the problem of uncontrollable size and poor quality of micro-textures on the surface of cemented carbide fabricated by nanosecond laser, the composite processing technology of ion beam etching (IBE) and nanosecond laser was put forward. For the first time, we propose an IBE-assisted laser processing approach to fabricate pit-type micro-textures on the surface of WC/Co cemented carbide substrate. The effects of laser scanning speed, repetition frequency, pulse width, and etching time on the surface morphology and structure size of micro-pits were studied, and the evolution model of micro-pits profile in this composite process was preliminarily predicted and established. The accumulation of molten materials at the edge of pit-type micro-textures increased with the increase of laser repetition frequency, which was inversely proportional to laser scanning speed and pulse width, and laser repetition frequency had the greatest influence among them. Besides, the diameter and depth of micro-pits fabricated can be adjusted by changing laser repetition frequency and etching time. After IBE for 150 min, the height of irregular bulge at the edge of micro-pits fabricated by nanosecond laser at 20 kHz, 25 kHz, 30 kHz, and 35 kHz repetition frequency decreased from 1.112 μm, 1.675 μm, 2.951 μm, and 3.235 μm to 0.222 μm, 0.689 μm, 0.976 μm, and 1.364 μm respectively, and the etching rate was proportional to laser repetition frequency. What’s more, the surface roughness of polished cemented carbide increased from 0.022 μm to 0.079 μm after IBE for 150 min, while which of laser textured cemented carbide decreased with the increase of etching time. In conclusion, the evolution of surface micro-textures profile based on IBE-assisted nanosecond laser is established, and the high precision controllable fabrication of micro-textures on WC/Co cemented carbide surface is realized. |
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