| LI Lin-ru,WANG Zhen-yu,ZUO Xiao,LIU Lin-lin,HUANG Mei-dong,KE Pei-ling,WANG Ai-ying.Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS[J],48(9):70-77 |
| Comparative Study on Structure and Properties of TiSiN Coatings Prepared by DCMS and HiPIMS |
| Received:June 12, 2019 Revised:September 20, 2019 |
| View Full Text View/Add Comment Download reader |
| DOI：10.16490/j.cnki.issn.1001-3660.2019.09.006 |
| KeyWord:HiPIMS TiSiN coating nanocomposite low stress high hardness |
| Author | Institution |
| LI Lin-ru |
1.School of Physics and Materials Science, Tianjin Normal University, Tianjin , China; 2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo , China |
| WANG Zhen-yu |
2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo , China |
| ZUO Xiao |
2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo , China |
| LIU Lin-lin |
2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo , China |
| HUANG Mei-dong |
1.School of Physics and Materials Science, Tianjin Normal University, Tianjin , China |
| KE Pei-ling |
2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo , China; 3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing , China |
| WANG Ai-ying |
2.a.Key Laboratory of Marine Materials and Related Technologies, b.Zhejiang Key Laboratory of Marine Materials of Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo , China; 3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing , China |
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| Abstract: |
| The work aims to comparatively study the composition, microstructure and properties of TiSiN coatings prepared by the two different methods, high power impulse magnetron sputtering and direct current magnetron sputtering, so as to provide the theoretical basis and experimental guidance for the preparation of hard coatings by different magnetron sputtering techniques. The TiSiN coatings were prepared by HiPIMS and DCMS under the same power density. The structure and morphology of the coatings were characterized by X-ray diffractometry, X-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, surface profilometry, and scanning probe microscopy. The mechanical, tribological and corrosion resistance properties of the coatings were characterized by nanoindentor, scratch tester, UMT-3 reciprocating friction and wear tester and electrochemical workstation, respectively. Compared with the TisiN coatings prepared by DCMS, the TiSiN coatings prepared by HiPIMS technology demonstrated smoother surface and more compact structure. The hardness increased by 10% while the stress reduced by 35%, so the coatings exhibited higher hardness but lower stress. The toughness and coating-substrate adhesion also increased obviously. The coating-substrate adhesion was increased from 40 N to 50 N. The wear and corrosion resistance were also improved and the friction coefficient and corrosion current density were reduced by 10% and almost one order of magnitude, respectively. Therefore, compared with DCMS, HiPIMS technology presents significant advantages in the preparation of TiSiN nanocomposite coatings, and effectively improves the comprehensive performance of the coatings. |
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