| DOU Zhi-qiang,XIAO Chang-jiang,LI Zheng-xin.Research Progress of Diamond Surface Etching Technology[J],47(4):90-95 |
| Research Progress of Diamond Surface Etching Technology |
| Received:October 24, 2017 Revised:April 20, 2018 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2018.04.013 |
| KeyWord:diamond surface etching plasma etching molten salt etching gas phase etching solid phase etching |
| Author | Institution |
| DOU Zhi-qiang |
School of Materials Science and Engineering, Henan University of Technology, Zhengzhou , China |
| XIAO Chang-jiang |
School of Materials Science and Engineering, Henan University of Technology, Zhengzhou , China |
| LI Zheng-xin |
School of Materials Science and Engineering, Henan University of Technology, Zhengzhou , China |
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| Abstract: |
| Diamond is of great application value in various fields including quantum information device, biomedical carrier, biosensor, high performance electrode and chemical analysis sensor. Diamond surface etching technology is the key to realizing abovementioned applications of diamond. According to phase of etchant, common etching technologies can be classified into molten salt etching, gas phase etching, solid phase etching, gas solid phase mixing etching and plasma etching. Molten salt etching uses molten ion compounds to etch diamond surfaces, and its etching mechanism is mainly oxidation process of diamond carbon atoms. Gas phase etching transforms carbon atoms in the diamond into other gaseous compounds including carbon monoxide for etching based upon gas-solid phase reaction between gases including oxygen and diamond surface. Gas-solid phase etching enhances reaction between hydrogen and diamond to produce methane for diamond etching with nickel, platinum and other metals as catalysts. Solid phase etching is reverse process of diamond synthesis, which mainly applies catalytic graphitization to the diamond with iron cobalt nickel and its salt, later these metals form carbon solid solution as a solvent for diamond etching. Plasma etching mainly realizes diamond etching based upon reaction between diamond and plasma like oxygen. This paper emphatically introduces research progress of these five kinds of diamond surface etching technology, and briefly analyzes principle, characteristics and purpose of these technologies. |
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