| WANG Lu,JIN Yong-zhong,LIN Xiu-zhou,CHEN Chang-hao.Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating[J],46(11):237-240 |
| Effects of Substrate Bias Duty Cycle on Morphology and Mechanical Properties of TiAlSiN Coating Deposited by Muti-arc Ion Plating |
| Received:April 27, 2017 Revised:November 20, 2017 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2017.11.032 |
| KeyWord:multi-arc ion plating TiAlSiN coating duty cycle surface morphology mechanical properties |
| Author | Institution |
| WANG Lu |
School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong , China |
| JIN Yong-zhong |
School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong , China |
| LIN Xiu-zhou |
School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong , China |
| CHEN Chang-hao |
School of Materials Science and Engineering, Sichuan University of Science and Engineering, Zigong , China |
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| Abstract: |
| The work aims to study effects of duty cycle parameters on surface morphology and mechanical properties of TiAlSiN coating by depositing TiAlSiN coating on the surface of cemented carbide substrate by adopting multi-arc ion plating. Morphology of the coating was observed with scanning electron microscope, and mechanical properties of the coating were detected with automatic scratch tester and nano indentation tester. With the increase of duty cycle (10%~70%), the ion bombardment was strengthened, and the coating surface was greatly improved, large particles and tiny-pit defects decreased gradually. However, large particles and tiny-pit defects increased as the duty cycle increased to 90%. Nano-hardness, elastic modulus and adhesion of the coating first increase and then decrease as the duty cycle increases, and reach the maximum value of 48.15 GPa, 518.24 GPa, 50.55 N at 50%, respectively at the duty cycle of 50%. |
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