| SHI Wen-yan,LU Bin-bin,CHEN Yan,YE Ping,JIANG Bai-ling.Effect of Carbon Target Current on Structure and Performance of Chromium-based GLC Coatings[J],46(8):109-114 |
| Effect of Carbon Target Current on Structure and Performance of Chromium-based GLC Coatings |
| Received:February 15, 2017 Revised:August 20, 2017 |
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| DOI：10.16490/j.cnki.issn.1001-3660.2017.08.018 |
| KeyWord:magnetron sputtering GLC films carbon target current structural analysis performance |
| Author | Institution |
| SHI Wen-yan |
Product Quality Supervision and Inspection Institute of Taizhou City, Taizhou , China |
| LU Bin-bin |
Product Quality Supervision and Inspection Institute of Taizhou City, Taizhou , China |
| CHEN Yan |
Product Quality Supervision and Inspection Institute of Taizhou City, Taizhou , China |
| YE Ping |
Product Quality Supervision and Inspection Institute of Taizhou City, Taizhou , China |
| JIANG Bai-ling |
School of Materials Science and Engineering, Nanjing Technology University, Nanjing , China |
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| Abstract: |
| The work aims to prepare chromium-based GLC coatings of different thickness through changing carbon content of the coatings by controlling carbon target current in the method of physical vapor deposition magnetron sputtering method, so as to further explore effects of carbon content on structure and performance of chromium-based graphite coatings. Bonding strength of the film-substrate was evaluated in indentation and scratching methods. Hardness of the coatings was analyzed using Vickers microhardness tester. Electrical conductivity of the coatings was measured using a ST-2258A four-point probe tester. Microstructure of the coatings was analyzed using a scanning electron microscope (SEM). Tribological properties of the coatings were investigated using a friction and wear tester. With the increase of carbon target current, cross-sectional stylolitization of the coating was more obvious and diameter of surface cluster particles increased. When the carbon target current was 1 A, cross-sectional morphology of the coatings was fine-grain cluster structure. When the carbon target current was 3 A, a columnar structure was present on cross section of the coatings. Composite hardness of the coating increased as the carbon target current increased. When the carbon target current was 3 A, microhardness of the coating was the maximum, i.e., 436HV. With the increase of carbon target current, electrical conductivity of the coatings gradually increased. As the carbon target current increases, coating density and friction coefficient decrease gradually while electrical conductivity of the coating increases gradually. Proper carbon target current can achieve optimum efficiency in functional and mechanical properties of graphite coatings. |
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