| HUANG Hong-guang,GUO Zhong-ning,WANG Guan.Research and Process Optimization on Undercut of Die Steel in Micro-etching[J],42(6):44-47 |
| Research and Process Optimization on Undercut of Die Steel in Micro-etching |
| Received:July 18, 2013 Revised:August 18, 2013 |
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| DOI： |
| KeyWord:die steel Micro-etching undercut orthogonal experiment |
| Author | Institution |
| HUANG Hong-guang |
Guangdong University of Technology, Guangzhou , China |
| GUO Zhong-ning |
Guangdong University of Technology, Guangzhou , China |
| WANG Guan |
Guangdong University of Technology, Guangzhou , China |
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| Abstract: |
| Objective To study the effects of HNO3 concentration, spray pressure, mask gap and etching time on undercut . Methods Orthogonal experiment was designed to measure the undercut, meanwhile, analysis methods such as range analysis and analysis of variance were used to analyze the undercut, and the results were then verified using confirmatory experiment . Results It was found that the experiment conditions of the least undercut were a HNO3 concentration of 0 . 3 mol / L, a spray pressure of 0 . 2 MPa, a mask gap of 50 μm and an etching time of 2 min. The undercut increased with the increase of the etching time, the spray pressure, and the mask gap, while it decreased with the rising concentration of HNO3 . Conclusion Etching time has a significant effect on undercut . Other important influencing factors were spray pressure, followed by mask gap and HNO3 concentration. Verification test showed that the optimal experiment scheme was feasible. |
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