| LI Guo-ming,SUN Shi-yao,CHEN Xue-qun.Effects of Film Forming Parameter on the Properties of Ion-beam Aiding Deposition TiN Thin Film[J],37(6):66-68 |
| Effects of Film Forming Parameter on the Properties of Ion-beam Aiding Deposition TiN Thin Film |
| Received:July 23, 2008 Revised:December 10, 2008 |
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| DOI： |
| KeyWord:Fe-Cr-Mo magnetism alloys Ion-beam aiding deposition Microhardness Corrosion resistance,TiN film |
| Author | Institution |
| LI Guo-ming |
Materials and Chemistry Department of Science College, Naval Engineering University, Wuhan , China |
| SUN Shi-yao |
No.161 Hospital of the PLA. Wuhan , China |
| CHEN Xue-qun |
Materials and Chemistry Department of Science College, Naval Engineering University, Wuhan , China |
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| Abstract: |
| To improve the biocompatibility and abrasion resistance and corrosion resistance of the dentistry materials, the ion-beam assisted deposition (IBAD) method was introduced to the study on the dentistry Fe-Cr-Mo alloys. The thin TiN film was prepared on the substrate of dentistry Fe-Cr-Mo alloys using IBAD method. The hardness of the film was measured. In the simulated mouth solution, the corrosion resistance of this film was examined in terms of corrosion potential, corrosion current density, polarization resistance and dynamic polarization curves. The blank Fe-Cr-Mo alloys substrate was used as comparison group. The results show that Fe-Cr-Mo alloys with TiN film has higher hardness and better corrosion resistance than the alloys without IBAD treatment. The TiN film has different hardness and corrosion resistance according to different film forming parameters. In IBAD treatment, when the nitrogen flux rate is l. 5ml/min and the treating time is 4 hours, we can obtained the most abrasion resistant and corrosion resistant TiN thin film in the simulated mouth solution. |
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