| WEI Mei-qin,ZHANG Guang-sheng,YAO Wen-jie.Aluminum-doped Zno Thin Films by the Sol-Gel Method[J],36(4):34-36 |
| Aluminum-doped Zno Thin Films by the Sol-Gel Method |
| Received:March 29, 2007 Revised:August 10, 2007 |
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| DOI： |
| KeyWord:Sol-gel method Al-doping C-axis orientation Electrical and optical properties Zno thin film |
| Author | Institution |
| WEI Mei-qin |
School of Mechanical Engineering, Anhui University of Technology and Science, Wuhu , China |
| ZHANG Guang-sheng |
School of Mechanical Engineering, Anhui University of Technology and Science, Wuhu , China |
| YAO Wen-jie |
Anhui Baihu Valve Factory Limited Company, Chaohu , China |
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| Abstract: |
| Al-doped Zno thin films were fabricated on glass substrates by sol-gel method. Their microstructures and morphologies were studied with X-ray diffraction ( XRD) and atomic force microscopy( AFM) . The results indicate that the thin films by the Sol-Gel method are c-axis orientation , homogeneous and dense surface with the crystalline structure of hexagonal wurtzite. Using the measurement of UV-Vis transmittance spectroscopy and standard four probes method, the electrical and optical properties of Al-doped Zno thin films were investigated. The experimental data show that their optical transmittance are over 80% in visible region and their favorable electrical conducting has been achieved with resistivity of 8. 0 xl0 -4Ω . cm derived by Al/Zn ratios of 4. 0% ; sol concentration of 0. 6mol/L; re-heat treatment at 300 0C ; annealing at 500℃ . |
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