张冬青,刘艳梅,王子铭,张晓松,李壮,曹凤婷,范其香,王铁钢.Mo含量对AlCrMoSiN涂层微观结构和性能的影响[J].表面技术,2025,54(1):32-41, 52. ZHANG Dongqing,LIU Yanmei,WANG Ziming,ZHANG Xiaosong,LI Zhuang,CAO Fengting,FAN Qixiang,WANG Tiegang.Effects of Mo Content on Microstructure and Properties of AlCrMoSiN Coatings[J].Surface Technology,2025,54(1):32-41, 52 |
Mo含量对AlCrMoSiN涂层微观结构和性能的影响 |
Effects of Mo Content on Microstructure and Properties of AlCrMoSiN Coatings |
投稿时间:2024-09-25 修订日期:2024-11-08 |
DOI:10.16490/j.cnki.issn.1001-3660.2025.01.003 |
中文关键词: AlCrMoSiN涂层 高功率脉冲磁控溅射 脉冲直流磁控溅射 Mo含量 力学性能 摩擦学行为 |
英文关键词:AlCrMoSiN coating HiPIMS pulsed DC Mo content mechanical property tribological behavior |
基金项目:中央引导地方科技发展资金(24ZYCGCG00520);天津市自然科学基金项目(22JCZDJC00670, 22JCYBJC01600) |
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Author | Institution |
ZHANG Dongqing | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
LIU Yanmei | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
WANG Ziming | Changzhou NRB Corporation, Jiangsu Changzhou 213022, China |
ZHANG Xiaosong | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
LI Zhuang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
CAO Fengting | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
FAN Qixiang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
WANG Tiegang | Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing, Tianjin University of Technology and Education, Tianjin 300222, China |
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中文摘要: |
目的 解决AlCrSiN涂层在高速干切削工况下耐磨性不足,其服役寿命大幅降低的难题。方法 采用高功率脉冲磁控溅射和脉冲直流磁控溅射复合技术,对AlCrMoSiN涂层中的Mo含量进行优化,研制一系列具有不同Mo含量的AlCrMoSiN涂层,通过调节CrMo靶溅射功率,改变涂层中的Mo含量。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和高分辨透射电子显微镜(HRTEM)、纳米压痕仪、纳米划痕仪、高温摩擦磨损试验机等检测设备对涂层微观形貌、物相组成、力学性能、摩擦学行为进行表征。结果 随Mo含量的增加,AlCrMoSiN涂层的晶粒尺寸增大,涂层厚度增加;XRD衍射峰向大角度偏移,并在(111)和(200)晶面上择优取向明显,涂层中逐渐形成以fcc-(Al,Cr,Mo)N固溶相为主的结构。Mo元素的掺杂使涂层内部出现晶格畸变现象,在一定程度上增强了涂层的韧性。当涂层中Mo的原子数分数达到21.3%时,涂层的特征值H/E和临界载荷达到最高,分别为0.059和67.62 N,涂层的摩擦因数为0.54,磨损率最低为7.97×10–4 µm3/(N.µm)。结论 Mo元素的掺杂提高了AlCrMoSiN涂层的结晶度,当Mo的原子数分数为21.3%时,涂层的耐磨损性能最佳。 |
英文摘要: |
AlCrSiN coating has broad application prospects in the field of cutting because of its high hardness and stable chemical properties. However, in the processing environment of high speed, high temperature and dry cutting, the wear resistance of the AlCrSiN coating is poor, resulting in cracks or even spalling of the coating, which seriously limits its superior performance. Therefore, it is urgent to develop a new tool coating with self-lubricating properties suitable for high temperature working environments. If a certain appropriate amount of Mo element is introduced into the AlCrSiN coating, it is expected to produce lattice distortion and strengthen the grain boundary through the replacement of Mo atoms with metal atoms in the nitride lattice, thereby improving the performance of the coating. At the same time, Mo element has the characteristic of easy oxidation at high temperature, and MoO3 lubricating films with low shear modulus can be formed during the friction process, which will effectively improve the wear resistance of the coating. However, when the content of Mo element is too high, the mechanical properties of the coating will be seriously reduced, and the coating is prone to cracking or spalling. On the contrary, when the Mo content is too low, the anti-friction effect is not obvious. In this study, the Mo content in the AlCrMoSiN coating was optimized by high power pulsed magnetron sputtering and pulsed DC magnetron sputtering composite technology. AlCrSi alloy (atomic ratio 6∶3∶1), CrMo alloy (atomic ratio 1∶4) and Cr element were used as targets . The Cr target was mainly used for bombardment cleaning and deposition of a CrN transition layer. Cemented carbide (25 mm×25 mm×3 mm), superalloy (25 mm×25 mm×2 mm) and single crystal silicon wafer (30 mm× 10 mm×0.67 mm) were used as experimental substrates. A series of AlCrMoSiN coatings with different Mo contents were developed by adjusting the sputtering power of the CrMo target (0-0.8 kW) at the deposition temperature of 400 ℃ and the deposition pressure of 1.6 Pa. The microstructure, phase composition, mechanical properties and tribological behavior of the coatings were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM), nanoindentation, nanoscratch tester and high temperature friction and wear tester. The results showed that with the increase of Mo content, the crystallinity of the AlCrMoSiN coatings increased, the grain size increased, and the coating thickness increased. The XRD diffraction peak shifted to a large angle, and the preferred orientation was obvious on the (111) and (200) crystal planes, and the structure dominated by fcc-(Al, Cr, Mo)N solid solution phases was gradually formed in the coatings. The hardness, elastic modulus and friction coefficient of the coatings decreased. The eigenvalues H/E and H3/E2 increased first and then decreased. The wear rate decreased first and then increased. When the Mo content in the coatings reached 21.3at.%, the characteristic value H/E and critical load of the coatings reached the highest, which were 0.059 and 67.62 N, respectively. The friction coefficient of the coatings under room temperature friction was 0.54, and the lowest wear rate was 7.97×10–4 µm3/(N.µm), which was one order of magnitude better than that of the AlCrSiN coatings. |
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