张而耕,付巧慧,梁丹丹,陈强,周琼,黄彪.硬质TiAlCN多层膜的微观结构设计与摩擦磨损性能研究[J].表面技术,2024,53(23):143-152.
ZHANG Ergeng,FU Qiaohui,LIANG Dandan,CHEN Qiang,ZHOU Qiong,HUANG Biao.Microstructural Design and Tribological Properties of TiAlCN Multilayer Films[J].Surface Technology,2024,53(23):143-152 |
| 硬质TiAlCN多层膜的微观结构设计与摩擦磨损性能研究 |
| Microstructural Design and Tribological Properties of TiAlCN Multilayer Films |
| 投稿时间：2023-12-20 修订日期：2024-05-23 |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.23.012 |
| 中文关键词: TiAlCN 多层涂层 结构设计 力学性能 摩擦学性能 |
| 英文关键词:TiAlCN multi-layer coating structure design mechanical property tribological properties |
| 基金项目:上海市优秀技术带头人计划资助(22XD1434500);校协同创新项目(XTCX2022-24);引进人才科研经费(YJ2022-31);国家自然科学基金(51901138);上海市自然科学基金(20ZR1455700);浙江省水利水电装备表面工程技术研究重点实验室开放基金资助(20240307) |
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| Author | Institution |
| ZHANG Ergeng | Shanghai Physical Vapor Deposition PVD Superhard Coating and Equipment Engineering Technology Research Center, Shanghai Institute of Technology, Shanghai 201418, China |
| FU Qiaohui | Shanghai Physical Vapor Deposition PVD Superhard Coating and Equipment Engineering Technology Research Center, Shanghai Institute of Technology, Shanghai 201418, China |
| LIANG Dandan | Shanghai Physical Vapor Deposition PVD Superhard Coating and Equipment Engineering Technology Research Center, Shanghai Institute of Technology, Shanghai 201418, China |
| CHEN Qiang | Shanghai Physical Vapor Deposition PVD Superhard Coating and Equipment Engineering Technology Research Center, Shanghai Institute of Technology, Shanghai 201418, China |
| ZHOU Qiong | Shanghai Physical Vapor Deposition PVD Superhard Coating and Equipment Engineering Technology Research Center, Shanghai Institute of Technology, Shanghai 201418, China |
| HUANG Biao | Shanghai Physical Vapor Deposition PVD Superhard Coating and Equipment Engineering Technology Research Center, Shanghai Institute of Technology, Shanghai 201418, China |
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| 中文摘要: |
| 目的 利用阴极电弧离子镀技术在不锈钢基体上分别制备了以TiN为打底层的TiAlCN单层涂层、TiAlN-TiAlCN双层涂层及TiAlN-TiAlCN多层涂层，研究并得出多层结构能提高TiAlCN涂层力学性能和耐磨性能。方法 采用扫描电镜(SEM)、X射线衍射仪(XRD)、拉曼光谱仪表征TiAlCN涂层的微观形貌和物相组成;进一步，通过纳米压痕仪、维氏硬度计评估TiAlCN涂层的力学性能;最后，通过摩擦磨损试验机、拉曼光谱仪和能谱仪(EDS)等分析了TiAlCN涂层的摩擦磨损性能。结果 所制备的TiAlCN单层涂层、TiAlN-TiAlCN双层涂层及TiAlN-TiAlCN多层涂层均存在液滴，且多层结构能够显著提高TiAlCN涂层的表面质量。3种涂层的主要组成相均为(Ti,Al)(C,N)，且沿着(111)、(200)、(220)的晶面择优生长。相较于TiAlCN单层和TiAlN-TiAlCN双层涂层，TiAlN-TiAlCN多层涂层表现出较高的硬度和较好的韧性。摩擦磨损后，3种涂层的ID/IG值均提高，表明涂层的石墨化程度均增加。另外，TiAlCN涂层的磨损机理均为磨粒磨损和氧化磨损，其中TiAlN-TiAlCN多层涂层的摩擦因数最高(0.26)、磨损率最低(9.3×10‒6 mm3/(N∙m))。结论 结构对于TiAlCN涂层的力学性能及摩擦学性能有显著的影响，相较于单层及双层涂层，多层结构的引入有效提高了TiAlCN涂层的力学性能及耐磨性。 |
| 英文摘要: |
| Although TiAlCN coating exhibits high hardness and good self-lubricity in high-speed cutting and non-lubricated working environments, the microcracks and spalling generated during the practical applications greatly limit its wide application. Therefore, how to improve the toughness of the TiAlCN coating and enhance the binding force between the coating and the substrate has become a hot spot in the research. Previous studies have shown that the mechanical properties of coatings can be further improved by adjusting or designing the microstructure of the coatings. However, there are fewer studies on the structural changes of TiAlCN coatings and their effects on mechanical and tribological properties. Therefore, the effect of the multilayer structure on the mechanical and tribological properties of TiAlCN coatings was investigated, and the underlying mechanism was also discussed. Based on the cathode arc technique, a TiAlCN monolayer coating, a TiAlN-TiAlCN bilayer coating, and a TiAlN-TiAlCN multilayer coating were deposited on 316 stainless steel substrates with a dimension 20 mm×20 mm×2 mm. In order to improve the binding force between the coating and the substrate, the bottom layer TiN was successfully deposited on the substrate. The micromorphology and phase composition of the TiAlCN coating were characterized by scanning electron microscopy (SEM), X-ray diffractometer (XRD) and Raman spectrometer, respectively. Furthermore, the mechanical properties of the TiAlCN coating were evaluated by nanoindentation instrument and Vickers hardness tester. Finally, the tribological properties of the TiAlCN coating were analyzed by friction wear testing machine, Raman spectrometer, and energy dispersive spectrometer (EDS). The experimental results and analysis showed that the introduction of multilayer structure could improve the mechanical properties and wear resistance of the TiAlCN coating. The results showed that there are large droplets in all TiAlCN coatings. In addition, the introduction of multilayer interfaces could effectively inhibit the growth of columnar crystals and refine the grain size, thus significantly improving the surface quality of the TiAlCN multilayer coatings. The main compositional phases of all TiAlCN coatings were (Ti, Al)(C, N), which grew along the (111), (200) and (220) crystal planes. However, compared with the monolayer coating, the diffraction peak of the bilayer and multilayer coatings were shifted due to the change of lattice constant. Among these three coatings, the TiAlCN multilayer coating showed the highest hardness and the best toughness benefiting from the coherent strengthening effect and modulus difference theory. Moreover, the multilayer coating could produce more elastic deformation to disperse and absorb stress under load. The ID/IG values of the worn TiAlCN coatings were increased, indicating the enhanced degree of graphitization of TiAlCN coatings. The wear mechanisms of all TiAlCN coatings were abrasive wear and oxidation wear. In addition, the TiAlCN multilayer coating presented the highest friction coefficient (0.26) and the lowest wear rate (9.3×10‒6 mm3/(N∙m)), which was ascribed to the increased contact area between the TiAlN sublayer and the friction pair, the larger ID/IG ratio, and the higher oxidation degree. Consequently, compared with monolayer and bilayer TiAlCN coatings, the mechanical properties and wear resistance of TiAlCN multilayer coatings could be significantly improved by the introduction of multilayer structure. |
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