杭伟,王应刚,韦岚清,韩云晓,马毅,陈泓谕.3D打印镍基合金GH3536化学机械抛光机理研究[J].表面技术,2024,53(20):143-157. HANG Wei,WANG Yinggang,WEI Lanqing,HAN Yunxiao,MA Yi,CHEN Hongyu.Mechanism of Chemical Mechanical Polishing of 3D Printed Nickel-based Alloy GH3536[J].Surface Technology,2024,53(20):143-157 |
3D打印镍基合金GH3536化学机械抛光机理研究 |
Mechanism of Chemical Mechanical Polishing of 3D Printed Nickel-based Alloy GH3536 |
投稿时间:2024-01-18 修订日期:2024-04-20 |
DOI:10.16490/j.cnki.issn.1001-3660.2024.20.012 |
中文关键词: 增材制造 镍基合金GH3536 化学机械抛光 表面粗糙度 加工机理 |
英文关键词:additive manufacturing nickel-based alloy GH3536 chemical mechanical polishing surface roughness processing mechanism |
基金项目:国家重点研发计划(2023YFE0202900);国家自然科学基金(52375468,52275467,52305515);浙江省省自然科学基金(LZY23E050004,LY21E050011);湖州市重点研发“揭榜挂帅”项目(2017M621966) |
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Author | Institution |
HANG Wei | Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014, China |
WANG Yinggang | Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014, China |
WEI Lanqing | Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014, China |
HAN Yunxiao | Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014, China |
MA Yi | Research Center of Advanced Lightweight and High-performance Materials, Nanjing University of Technology, Nanjing 210009, China |
CHEN Hongyu | Key Laboratory of Special Equipment Manufacturing and Advanced Processing Technology of Ministry of Education, Zhejiang University of Technology, Hangzhou 310014, China |
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中文摘要: |
目的 实现无瑕疵的3D打印镍基合金GH3536超光滑镜面,揭示镍基合金GH3536在不同成分溶液下的化学机械抛光(Chemical Mechanical Polishing,CMP)去除机理。方法 采用单因素实验法通过CMP对镍基合金GH3536展开研究。采用电化学测试技术和X射线光电子能谱(X-ray Photoelectron Spectroscopy,XPS)分析3D打印镍基合金GH3536在不同pH值、不同氧化剂浓度和不同抛光液类型下的溶解与钝化行为。结果 当pH值为3~3.5、H2O2质量分数为10%时,可获得最优的材料去除率(MRR为20.24 nm/min)和表面粗糙度(Surface Roughness,其中Ra为0.684 nm,Sa为1.699 nm),CMP抛光面可达到超光滑低损伤的镜面效果。根据电化学和XPS测量结果,建立了化学反应方程,确定了去除机理,具体为:在化学机械抛光过程中,镍基合金GH3536表面首先被H2O2氧化成Ni、Fe等氧化物;其次,在酸性H+作用下,氧化物转化为Ni2+、Ni3+和Fe3+等多价离子;最后,多价离子会与柠檬酸发生络合反应生成较软的柠檬酸盐络合物,在CMP抛光中发生去除。结论 与传统电化学加工相比,采用CMP加工的3D打印镍基合金GH3536的表面粗糙度更低,表面形貌更好,可用于对面型精度要求较高的镍基合金的超精密加工。基于电化学测试技术和XPS深度剖析的方法有效揭示了镍基合金GH3536的材料去除机理,获得了不同pH值、氧化剂浓度和不同抛光液种类对材料去除机理的影响规律。为获得新型高质量表面的3D打印合金材料提供指导意义。 |
英文摘要: |
Nickel-based superalloy GH3536 is a preferred material in the aerospace industry due to its high corrosion resistance, oxidation resistance, high-temperature resistance, and excellent processability. However, its surface polishing still remains a serious challenge. Traditional techniques such as electrochemical polishing are unable to achieve non-damage mirror processing, and the used electrolyte pollutes the environment. This study aims to investigate the removal mechanism of chemical-mechanical polishing (CMP) for GH3536 nickel-based alloy in different composition solutions to obtain a flawless 3D-printed ultra-smooth mirror. The CMP was studied by a single-factor test. Electrochemical test technology and X-ray photoelectron spectroscopy were applied to find out the rate of reaction and the valence state of the surface in the CMP process. This helped to figure out the specific corrosion process and complexation reaction. It found out how fast the passivation film formed and how quickly it was removed from the alloy's surface by looking at how the corrosion potential and current changed over time in the polishing liquid. The ways the chemical makeup of the polishing liquid affected the surface of the material were also found. The elemental composition and electronic state of the surface of the 3D-printed nickel-based alloy GH3536 were measured. The surface morphology of the nickel-based alloy was observed by an ultra-depth microscope and a Zeiss field emission scanning electron microscope. The Material Removal Rate (MRR) of the alloy was calculated by precision balance, and the roughness change of the alloy was measured by an optical 3D surface profiler. The material removal rate and surface roughness were used to characterize nickel-based alloys. The material removal rate of GH3536 decreased with the increase of PH value and increased with the increase of oxidant concentration during CMP processing. Surface roughness decreased first and then increased with the increase in PH value and oxidizer concentration. The results showed that when the PH value was 3-3.5 and H2O2 concentration was 10%, the optimal material removal rate and surface roughness (Ra was 0.684 nm and Sa was 1.699 nm) could be obtained, and the CMP polishing surface could achieve an ultra-smooth and low-damage mirror effect, which could be used for ultra-precision machining of nickel-based alloys with high profile accuracy. The chemical reaction equation was established based on the electrochemical and XPS measurements. It was determined that the surface of nickel-based alloy GH3536 was first oxidized into oxides such as Ni and Fe during the CMP process and then formed polyvalent ions such as Ni and Fe under the action of acidic H+. Finally, the complex reaction with citric acid was carried away from the surface or mechanically removed. In conclusion, the 3D printed nickel-based alloy GH3536 processed by CMP has lower surface roughness and better surface morphology than that after conventional electrochemical machining, which can be used for ultra-precision machining of nickel-based alloys with high requirements for face shape accuracy. And the material removal mechanism of nickel-based alloy GH3536 is effectively revealed based on electrochemical technology and XPS depth profiling, and the laws of different pH values, oxidizer concentrations and different polishing liquid slurries on the material removal mechanism are obtained. It provides guidance for obtaining new 3D printing alloy materials with high quality surfaces. |
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