唐紫妍,魏菁,陈仁德,崔丽,郭鹏,汪爱英.类金刚石碳基涂层热稳定性研究进展[J].表面技术,2024,53(20):1-18.
TANG Ziyan,WEI Jing,CHEN Rende,CUI Li,GUO Peng,WANG Aiying.Research Progress on Thermal Stability of Diamond-like Carbon-based Coatings[J].Surface Technology,2024,53(20):1-18 |
| 类金刚石碳基涂层热稳定性研究进展 |
| Research Progress on Thermal Stability of Diamond-like Carbon-based Coatings |
| 投稿时间：2024-01-03 修订日期：2024-03-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.20.001 |
| 中文关键词: 类金刚石涂层 热稳定性 高温 调控方法 微结构特征 失效机理 |
| 英文关键词:DLC thermal stability high temperature regulation method microstructure characteristics failure mechanism |
| 基金项目:国家自然科学基金杰出青年基金(52025014);国家自然科学基金(U20A20296，52205237) |
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| Author | Institution |
| TANG Ziyan | Faculty of Materials Science and Chemical Engineering, Ningbo University, Zhejiang Ningbo 315211, China;Key Laboratory of Advanced Marine Materials,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| WEI Jing | Key Laboratory of Advanced Marine Materials,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| CHEN Rende | Key Laboratory of Advanced Marine Materials,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| CUI Li | Key Laboratory of Advanced Marine Materials,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| GUO Peng | Key Laboratory of Advanced Marine Materials,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
| WANG Aiying | Key Laboratory of Advanced Marine Materials,Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Ningbo 315201, China |
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| 中文摘要: |
| 类金刚石碳基(Diamond-like Carbon，DLC)涂层性能优异，前景广阔，但热稳定性不足制约了DLC涂层在严苛高温工况下的应用。首先，综述了DLC涂层热稳定性研究方法的发展现状，对比了热处理结合非原位测试、热分析、高温原位测试、模拟计算4种常用研究方法的优劣势。其次，归纳总结了组分、制备方法和退火环境对DLC涂层热稳定性的影响过程和作用机制，发现高sp3含量的无氢DLC涂层呈现出最优异的热稳定性。而不同制备方法通过影响涂层结构、sp3含量、氢含量获得热稳定性各异的DLC涂层。另外，涂层在真空及惰性气体环境中的热稳定性比含氧环境更好。通过异质第三元素掺杂、多层结构、梯度结构，可进一步提高DLC涂层热力学性能。其中，元素掺杂通过改变DLC组分和键态结构，实现对涂层热稳定性的调控;而多层及梯度结构设计主要通过降低涂层应力，突破厚膜关键制备技术，进而提高涂层热稳定性。结合涂层微结构的演变规律，进一步从涂层自身石墨化、氧化、脱氢和剥落行为，阐述了DLC涂层的高温失效机理。最后，对设计和发展DLC高温防护涂层材料技术的共性挑战和未来趋势做了分析展望。 |
| 英文摘要: |
| During the manufacturing and service processes, high-temperature conditions are likely to lead to product performance degradation and life loss. Surface coating protection technology is one of the ideal ways to prevent the failure of high temperature performance of products. Diamond-like carbon (DLC) coating has a wide application prospect due to its excellent comprehensive properties, such as high hardness, excellent wear resistance and corrosion resistance, low friction, self-lubrication and good thermal stability. However, with the rapid development of photoelectric information field, the manufacturing and service environment of products is becoming increasingly complex and extreme, especially under high temperature conditions, which puts forward more stringent requirements for the protective performance of DLC coatings. The lack of thermal stability limits the application of DLC coatings under harsh high temperature conditions. In this paper, the research and development on thermal stability of DLC coatings were reviewed. Firstly, the advantages and disadvantages of various heat treatments combined with ex-situ testing, thermal analysis, high temperature in-situ test and simulation calculation were comparatively addressed. Heat treatments combined with ex-situ testing could not determine the fine change of composition structure of materials during heat treatment. Thermal analysis was mainly used to determine the transition temperature of coating structure, which could only indirectly reflect the evolution law of coating structure at high temperature. High temperature in-situ testing effectively overcame the shortcomings of the above research methods, and could observe the evolution process of morphology, structure and properties of coating materials in real time, dynamically and continuously during high-temperature treatment, which was the most ideal research way to reveal the changes of thermodynamic properties of coatings. Simulation calculation could break through the limitations of existing experimental characterization methods, efficiently and conveniently simulate the thermodynamic behavior of DLC coatings at high temperature from molecular and atomic scales, and at the same time promote and guide experimental research. Secondly, the influence process and mechanism of composition, preparation method and annealing environment on the thermal stability of DLC coatings were summarized, and it was found that the hydrogen-free DLC coatings with high sp3 content presented the best thermal stability. However, DLC coatings with different thermal stability could be obtained by different preparation methods by influencing the coating structure, sp3 content and hydrogen content. Moreover, the deposition temperature, substrate bias, deposition pressure and other preparation processes would also affect the thermal stability of the coating. In addition, the thermal stability of the coating in vacuum and inert gas environments was better than that in oxygen environments. It was revealed that adding third elements into amorphous carbon matrix and introducing multilayer structure and gradient structure in DLC matrix could significantly enhance the thermal stability of DLC coatings. Among them, element doping could regulate the thermal stability of the coating by changing the composition and bond structure of DLC. The multilayer and gradient layer structure design mainly improved the thermal stability of the coating by reducing the stress of the coating and breaking through the key preparation of thick films. Combined with the evolution law of coating microstructure, the failure mechanism of DLC coatings at high temperature was further expounded from the graphitization, oxidation, dehydrogenation of the coating itself and peeling behavior. Finally, the common challenges and future trends of designing and developing DLC high temperature protective coating materials were analyzed and prospected. |
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