王旋,殷宇,张立业,代野,周富,彭冬,白懿心,丁星星,董玲抒,花泽荟,戴明辉,丛大龙.化学气相沉积陶瓷薄膜高温摩擦磨损性能研究[J].表面技术,2024,53(15):68-76.
WANG Xuan,YIN Yu,ZHANG Liye,DAI Ye,ZHOU Fu,PENG Dong,BAI Yixin,DING Xingxing,DONG Lingshu,HUA Zehui,DAI Minghui,CONG Dalong.High Temperature Friction and Wear Behaviours of Ceramic Films by CVD[J].Surface Technology,2024,53(15):68-76 |
| 化学气相沉积陶瓷薄膜高温摩擦磨损性能研究 |
| High Temperature Friction and Wear Behaviours of Ceramic Films by CVD |
| 投稿时间：2024-06-16 修订日期：2024-07-29 |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.15.006 |
| 中文关键词: 化学气相沉积 陶瓷薄膜 高温摩擦磨损 结合力 耐磨性 磨损机制 |
| 英文关键词:chemical vapor deposition ceramic film high temperature friction and wear bonding strength wear resistance wear mechanism |
| 基金项目: |
|
|
| Author | Institution |
| WANG Xuan | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| YIN Yu | Bohai Shipyard Group Co., Ltd., Liaoning Huludao 125004, China |
| ZHANG Liye | Bohai Shipyard Group Co., Ltd., Liaoning Huludao 125004, China |
| DAI Ye | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| ZHOU Fu | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| PENG Dong | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| BAI Yixin | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| DING Xingxing | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| DONG Lingshu | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| HUA Zehui | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| DAI Minghui | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
| CONG Dalong | Southwest Institute of Technology and Engineering of China South Industries Group Corporation, Chongqing 401329, China |
|
| 摘要点击次数: |
| 全文下载次数: |
| 中文摘要: |
| 目的 对比研究不同陶瓷薄膜的耐高温磨损性能。方法 采用化学气相沉积工艺制备了TiN/TiCN、TiN/Al2O3、TiN/TiCN/Al2O3 3种陶瓷薄膜。通过划痕测试、显微硬度测试、高温摩擦磨损试验等测试方法，分别表征并评价3种陶瓷薄膜的附着力、硬度、耐600 ℃高温磨损性能，并通过扫描电子显微镜和光学显微镜对磨痕形貌进行分析。结果 化学气相沉积制备的3种陶瓷薄膜结构致密，无孔隙、裂纹等缺陷，且与基材结合界面良好，其中，TiN/TiCN/Al2O3多层薄膜与基体结合力最佳，为68.53 N，但其表层Al2O3薄膜与中间层TiCN薄膜结合强度较弱。600 ℃高温摩擦磨损结果表明，TiN/Al2O3薄膜具有最高的高温摩擦因数，平均为0.51，但其耐高温磨损性能最佳，体积磨损率为0.58×10‒5 mm3/(N.m);而TiN/TiCN薄膜具有最低的高温摩擦因数，平均为0.37，但其耐高温磨损性能最差，体积磨损率为4.23×10‒5 mm3/(N.m)。结论 3种陶瓷薄膜高温摩擦磨损的主要损伤形式各异，TiN/TiCN薄膜的主要磨损机制为黏着磨损、氧化磨损和疲劳磨损，TiN/Al2O3薄膜的主要磨损机制为磨粒磨损，TiN/TiCN/Al2O3多层薄膜的主要磨损机制为磨粒磨损和氧化磨损。TiN/Al2O3薄膜的耐高温磨损性能最佳是由于其硬度较高，且化学性质稳定，主要磨损形式为磨粒磨损，较难被磨损去除。而TiN/TiCN薄膜耐高温磨损性能最差是由于TiCN薄膜硬度较低，在高温摩擦作用下，会发生氧化磨损、黏着磨损、疲劳磨损等多种损伤形式。 |
| 英文摘要: |
| The TiN/TiCN, TiN/Al2O3 and TiN/TiCN/Al2O3 ceramic films were prepared by chemical vapor deposition on mechanically polished H13 alloy steel to study the high temperature wear resistance. The adhesion, hardness and high temperature wear resistance at 600 ℃ of the three films were characterized and evaluated by means of scratch test, microhardness test and high temperature friction and wear test, and the wear morphology was analyzed by scanning electron microscope and optical microscope. The results showed that the outermost layer of the TiN/TiCN film showed an inverted pyramid shape, and the film thickness was about 8.8 μm. The outermost layer of the TiN/Al2O3 film had a loose structure and small pores were observed. The inverted pyramid grain was embedded into the film, and the film thickness was about 3.0 μm. The surface of TiN/TiCN/Al2O3 film presented particle cluster structure, and the thickness was about 10.8 μm. The three ceramic films prepared by CVD had dense structure, no pores, cracks and other defects, and had good bonding interface with the substrate. The TiN/TiCN/Al2O3 multilayer film had the best bonding strength with the substrate, which was 68.53 N and might be due to the good hardness gradient formed between TiN, TiCN and Al2O3. However, the bonding strength between the surface Al2O3 film and the middle layer TiCN film was weak. The results of high temperature friction and wear at 600 ℃ showed that TiN/Al2O3 film had the highest high temperature friction coefficient, with an average value of 0.51, but its high temperature wear resistance was the best and the volume wear rate was 0.58×10‒5 mm3/(N.m). The TiN/TiCN film had the lowest high temperature friction coefficient, with an average value of 0.37, but its high temperature wear resistance was the worst and the volume wear rate was 4.23×10‒5 mm3/(N.m). The main damage forms of the three ceramic films at high temperature were different. The main wear mechanisms of the TiN/TiCN films were adhesive wear, oxidation wear and fatigue wear. The main wear mechanism of the TiN/Al2O3 film was abrasive wear. The main wear mechanisms of the TiN/TiCN/Al2O3 multilayer film were abrasive wear and oxidation wear. The best high temperature wear resistance of the TiN/Al2O3 film was due to its high hardness and stable chemical properties and the main wear form was abrasive wear, which is difficult to be removed by wear. The high temperature wear resistance of the TiN/TiCN/Al2O3 multilayer film was worse than that of TiN/Al2O3 film, which might be due to the hard fragments formed when the high-hardness Al2O3 layer was worn off, having obvious cutting effect on the softer TiCN layer and increasing the wear rate of the multilayer film. The worst high temperature wear resistance of the TiN/TiCN film was due to the low hardness of TiCN film. Under the high temperature friction, it might lead to oxidative wear, adhesive wear, fatigue wear and other damage forms. EDS and Raman analysis results of the wear scar indicated that obvious oxidation wear occurred on the TiCN film during high temperature friction and wear, and the friction product was TiO2. |
| 查看全文 查看/发表评论 下载PDF阅读器 |
| 关闭 |
|
|
|
渝公网安备 50010702501715号