周意皓,陈文刚,程家豪,郭思良,魏北朝,袁浩恩,Dongyang Li.激光织构形状间距对单晶硅摩擦磨损特性的影响[J].表面技术,2024,53(11):127-139.
ZHOU Yihao,CHEN Wengang,CHENG Jiahao,GUO Siliang,WEI Beichao,YUAN Haoen,Dongyang，Li.Effect of Laser Texture Shape Spacing on Friction and Wear Characteristics of Monocrystalline Silicon[J].Surface Technology,2024,53(11):127-139 |
| 激光织构形状间距对单晶硅摩擦磨损特性的影响 |
| Effect of Laser Texture Shape Spacing on Friction and Wear Characteristics of Monocrystalline Silicon |
| 投稿时间：2023-09-22 修订日期：2023-12-26 |
| DOI：10.16490/j.cnki.issn.1001-3660.2024.11.011 |
| 中文关键词: 微织构 单晶硅 摩擦磨损 激光加工 摩擦因数 磨损率 摩擦生热 |
| 英文关键词:micro-texturing single crystal silicon frictional wear laser processing friction coefficient wear rate frictional heating |
| 基金项目:云南省Dongyang Li院士工作站项目(202305AF150019);国家自然科学基金(51865053);云南省教育厅科学研究基金(2023Y076，2023Y0760) |
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| Author | Institution |
| ZHOU Yihao | College of Mechanical and Transportation, Southwest Forestry University, Kunming 650224, China;Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China |
| CHEN Wengang | College of Mechanical and Transportation, Southwest Forestry University, Kunming 650224, China;Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China |
| CHENG Jiahao | College of Mechanical and Transportation, Southwest Forestry University, Kunming 650224, China;Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China |
| GUO Siliang | College of Mechanical and Transportation, Southwest Forestry University, Kunming 650224, China;Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China |
| WEI Beichao | College of Mechanical and Transportation, Southwest Forestry University, Kunming 650224, China;Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China |
| YUAN Haoen | College of Mechanical and Transportation, Southwest Forestry University, Kunming 650224, China;Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China |
| Dongyang，Li | Academician Dongyang Li Workstation in Yunnan Province, Kunming 650224, China;Department of Chemical and Materials Engineering, University of Alberta, Alberta Edmonton T6G 2H5, Canada |
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| 中文摘要: |
| 目的 提高单晶硅的减摩耐磨性能。方法 利用紫外激光在单晶硅试样表面刻蚀不同形状，间距为0.1、0.2、0.3 mm，宽度为0.2 mm的织构。基于MRTR-1摩擦磨损实验机，研究干摩擦条件下织构参数对单晶硅摩擦学性能的影响。利用光学显微镜和扫描电子显微镜(SEM)观察单晶硅表面织构的微观形貌和磨痕形貌，用电子天平称量实验前后试样的质量，并计算磨损率，通过Ansys有限元软件模拟仿真试样表面应力和摩擦生热的温度分布。结果 与无织构相比，刻蚀表面织构均能不同程度地降低试样的磨损率，磨损率从0.012 mm3/(N.m)降至0.008 mm3/(N.m);部分表面织构试样的摩擦因数下降，低于0.14;单晶硅试样的磨损机制主要为磨粒磨损和黏着磨损。仿真结果表明，织构试样的平均等效应力均大于无织构试样，在单晶硅试样表面加工织构会影响其表面整体性，容易出现应力集中现象;织构试样表面高于环境温度的区域面积小于无织构试样，且试样表面的最高温度与摩擦因数呈正相关。结论 在单晶硅表面加工织构，可以有效提高试样的耐磨性能，合适的织构参数还能够降低摩擦因数。通过加工表面织构，一方面可以影响试样的整体性，另一方面能够改善试样的散热性能。 |
| 英文摘要: |
| The primary objective of this research is to enhance the friction and wear resistance of single-crystal silicon materials, which hold significant importance in various technological applications. However, the practical use of single-crystal silicon is limited due to its susceptibility to wear, prompting continuous efforts by scholars both domestically and internationally to seek improvements. This study aims to provide an effective method for improving the tribological performance of single- crystal silicon. Given that ultraviolet laser processing technology can offer high processing precision and accuracy, this research chooses to use ultraviolet laser technology to create textures on the surface of single-crystal silicon to ensure experimental consistency and repeatability. To investigate the tribological performance of single-crystal silicon samples with different texture parameters, dry sliding tests were conducted with an MRTR-1 friction and wear test machine under standard atmospheric conditions at room temperature. The instantaneous friction coefficients of single-crystal silicon textured samples recorded by the experimental instrument were of vital importance for analyzing how texture influences friction and wear behavior. To gain deeper insights into the structural changes and wear patterns induced by surface texturing, optical microscopy, scanning electron microscopy (SEM), and X-ray energy-dispersive spectroscopy (EDS) were employed to examine the macro and micro wear morphology of single-crystal silicon textured samples, as well as the elemental composition and distribution state. This multi-faceted approach is aided in analyzing the impact of texture on the tribological properties of single-crystal silicon from a different perspective. Furthermore, an electronic balance was used to measure the mass of the single-crystal silicon textured samples before and after friction and wear tests, and the wear rate was calculated using relevant formulas. This quantified the contribution of surface texture to reduce the wear of single-crystal silicon, making the results more intuitive. On the other hand, the study also utilized Ansys finite element software for simulation and analysis. To understand the surface stress distribution and the magnitude and distribution of frictional heating temperature of single-crystal silicon textured samples, finite element simulation methods were employed to elucidate the role of surface texture in improving the tribological performance of single-crystal silicon from both a structural and heat dissipation perspective. After a series of experiments and analyses as described above, the following conclusions were drawn. In comparison to single-crystal silicon samples without texture preparation, all single-crystal silicon textured samples exhibited a significant reduction in the wear rate of single-crystal silicon, with values decreasing from 0.012 mm3/(N.m) to below 0.008 mm3/(N.m), and in some cases, reaching as low as 0.001. Some single-crystal silicon textured samples could also reduce the coefficient of friction. Analysis of SEM and EDS detection results revealed that the primary wear mechanisms for single-crystal silicon were abrasive wear and adhesive wear. In textured single-crystal silicon samples, there were fewer and shallower wear marks, indicating that surface texture could collect wear debris generated by friction and assisting in protecting the surface of single-crystal silicon and improving its tribological performance. In terms of simulation analysis, the average equivalent stress of textured single-crystal silicon samples was higher than that of untreated single-crystal silicon samples. This was because the processing texture on the single-crystal silicon sample disrupted its overall integrity, and the complex texture patterns led to stress concentration in the material. The temperature variations caused by frictional heating showed that the high-temperature region on the surface of textured samples was smaller than that on non-textured samples, indicating that continuous texture patterns could improve the heat dissipation capability of single-crystal silicon. In summary, surface texturing can improve the tribological performance of single-crystal silicon from multiple perspectives, significantly reducing its wear rate, decreasing the coefficient of friction, and enhancing heat dissipation capabilities. However, because texture can impact the strength of single-crystal silicon samples, it is essential to consider various factors when selecting texture parameters. The significance of this research extends beyond single-crystal silicon materials and can be applied to various materials that operate in frictional environments, improving their tribological performance and material protection. |
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