王桂云,陈利.Al含量对Cr1–xAlxN涂层力学、热稳定性、抗氧化性及耐蚀性的影响[J].表面技术,2022,51(2):39-47, 65.
WANG Gui-yun,CHEN Li.Effect of Al Content on the Mechanical Properties, Thermal Stability, Oxidation Resistance and Corrosion Resistance of Cr1–xAlxN Coatings[J].Surface Technology,2022,51(2):39-47, 65 |
| Al含量对Cr1–xAlxN涂层力学、热稳定性、抗氧化性及耐蚀性的影响 |
| Effect of Al Content on the Mechanical Properties, Thermal Stability, Oxidation Resistance and Corrosion Resistance of Cr1–xAlxN Coatings |
| 投稿时间：2021-10-31 修订日期：2022-01-04 |
| DOI：10.16490/j.cnki.issn.1001-3660.2022.02.004 |
| 中文关键词: CrAlN涂层 结构 硬度 热稳定性能 抗氧化性能 耐蚀性能 |
| 英文关键词:CrAlN coatings structure hardness, thermal stability, oxidation resistance,corrosion resistance |
| 基金项目:国家自然科学基金(51775560) |
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| 中文摘要: |
| 目的 探讨Al含量对Cr1–xAlxN涂层结构和性能的影响。方法 在阴极弧蒸发设备中，分别采用Cr、Cr0.70Al0.30、Cr0.50Al0.50、Cr0.40Al0.60和Cr0.30Al0.70靶材制备5种不同Al含量的Cr1–xAlxN涂层。借助能量色散X射线光谱仪(EDX)、X射线衍射仪(XRD)、纳米压痕仪、扫描电子显微镜(SEM)和电化学工作站对Cr1–xAlxN涂层的成分、结构、力学性能、热稳定性、抗氧化性和耐蚀性进行研究。结果 5种Cr1–xAlxN涂层均呈单相面心立方结构，其硬度随Al含量的增加而提升，由CrN的(16.9±0.8) GPa升至Cr0.75Al0.25N的(25.1±0.7) GPa、Cr0.56Al0.44N的(27.0±1.1) GPa、Cr0.46Al0.54N的(28.5±1.5) GPa和Cr0.36Al0.64N的(30.4±0.8) GPa。所有涂层在1000 ℃退火后，开始出现六方h-Cr2N的衍射峰，其衍射峰强度随Al含量的上升而降低。Cr0.75Al0.25N、Cr0.56Al0.44N和Cr0.46Al0.54N涂层在1100 ℃退火后，可检测到六方纤锌矿结构w-AlN相，而高Al含量Cr0.36Al0.64N涂层在1000 ℃退火后，便可检测到w-AlN相。在1000 ℃氧化15 h后，CrN涂层已经完全氧化，Cr0.75Al0.25N、Cr0.56Al0.44N、Cr0.46Al0.54N和Cr0.36Al0.64N涂层的氧化层厚度分别约为0.4、0.3、0.3、0.2 μm;在1100 ℃氧化15 h后，CrN、Cr0.75Al0.25N和Cr0.56Al0.44N涂层已完全氧化，而Cr0.46Al0.54N和Cr0.36Al0.64N涂层的氧化层厚度分别约为2.5、1.4 μm。CrN、Cr0.75Al0.25N、Cr0.56Al0.44N、Cr0.46Al0.54N和Cr0.36Al0.64N涂层在3.5%的NaCl溶液中测得的极化电阻分别为567.69、5.34、71.80、160.10、92.56 kΩ.cm2。结论 涂层的硬度和抗氧化性随Al含量的增加而提升。Al的加入在抑制Cr—N分解的同时，促进了涂层中w-AlN的生成。CrN涂层具有最优的耐蚀性，而在含Al涂层中，涂层的耐蚀性随Al含量的增加呈现出先上升、后下降的趋势。 |
| 英文摘要: |
| This paper is to investigate the effect of Al content on the structure and properties of Cr1–xAlxN coatings. Cr1–xAlxN coatings with different Al content were prepared in the cathodic arc evaporation equipment using Cr, Cr0.70Al0.30, Cr0.50Al0.50, Cr0.40Al0.60 and Cr0.30Al0.70 targets, respectively. The composition, structure, mechanical properties, thermal stability, oxidation resistance and corrosion resistance of the Cr1–xAlxN coatings were studied with the aid of energy dispersive X-ray spectroscopy (EDX), X-ray diffractometer (XRD), nanoindentation, scanning electron microscopy (SEM) and electrochemical workstations. All five Cr1-xAlxN coatings have a single-phase face-centered cubic structure, and their hardness increases with increasing Al content, from (16.9±0.8) GPa for CrN to (25.1±0.7) GPa for Cr0.75Al0.25N, (27.0±1.1) GPa for Cr0.56Al0.44N, (28.5±1.5) GPa for Cr0.46Al0.54N and (30.4±0.8) GPa for Cr0.36Al0.64N. After annealing at 1000 ℃, the diffraction peaks of hexagonal h-Cr2N began to appear in all coatings, and the intensity of the diffraction peaks decreased with the increase of Al content; the Cr0.75Al0.25N, Cr0.56Al0.44N and Cr0.46Al0.54N coatings can be detected in the hexagonal wurtxite w-AlN phase after annealing at 1100 ℃, while the high Al content Cr0.36Al0.64N coating can be detected in the w-AlN phase after annealing at 1000 ℃. After being oxidized at 1000 ℃ for 15 h, the CrN coating has been completely oxidized, and the oxide layer thicknesses of the Cr0.75Al0.25N, Cr0.56Al0.44N, Cr0.46Al0.54N and Cr0.36Al0.64N coatings were 0.4, 0.3, 0.3 and 0.2 μm, respectively. After being oxidized at 1100 ℃ for 15 h, the CrN, Cr0.75Al0.25N and Cr0.56Al0.44N coatings were completely oxidized, while the oxide layer thicknesses of Cr0.46Al0.54N and Cr0.36Al0.64N coatings were only 2.5 and 1.4 μm. The polarization resistances of CrN, Cr0.75Al0.25N, Cr0.56Al0.44N, Cr0.46Al0.54N and Cr0.36Al0.64N coatings measured in 3.5wt.% NaCl solution were 567.69, 5.34, 71.80, 160.10 and 92.56 kΩ.cm2. Respectively, the hardness and oxidation resistance of the coating increase with the increase of Al content; the addition of Al promotes the formation of w-AlN in the coating while inhibiting the decomposition of Cr-N bond; CrN coating has the best corrosion resistance, while in the Al-containing coating, the corrosion resistance of the coating first increased and then decreased with the increase of Al content. |
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