卢金德,韦春贝,林松盛,张佳平,李浩宇,李助军,刘怡飞,代明江,李风,刘敏.磁控溅射NiCrAlY/MoS2复合薄膜结构与性能研究[J].表面技术,2021,50(5):198-207.
LU Jin-de,WEI Chun-bei,LIN Song-sheng,ZHANG Jia-ping,LI Hao-yu,LI Zhu-jun,LIU Yi-fei,DAI Ming-jiang,LI Feng,LIU Min.Structure and Properties of NiCrAlY/MoS2 Composite Films Fabricated by Magnetron Sputtering[J].Surface Technology,2021,50(5):198-207
磁控溅射NiCrAlY/MoS2复合薄膜结构与性能研究
Structure and Properties of NiCrAlY/MoS2 Composite Films Fabricated by Magnetron Sputtering
投稿时间:2020-09-22  修订日期:2020-12-22
DOI:10.16490/j.cnki.issn.1001-3660.2021.05.022
中文关键词:  磁控溅射  NiCrAlY/MoS2复合薄膜  摩擦学性能  高温氧化
英文关键词:magnetron sputtering  NiCrAlY/MoS2 composite films  tribological properties  high temperature oxidation
基金项目:广东特支计划资助(2019BT02C629);中国航发创新基金项目(ZGHF-ZL-2017-C068);广东省自然科学基金研究团队项目(2016A030312015)
作者单位
卢金德 广东工业大学 材料与能源学院,广州 510006;广东省科学院新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州 510650 
韦春贝 广东省科学院新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州 510650 
林松盛 广东省科学院新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州 510650 
张佳平 中国航发沈阳黎明航空发动机有限责任公司,沈阳110043 
李浩宇 中国航发沈阳黎明航空发动机有限责任公司,沈阳110043 
李助军 广州铁路职业技术学院 机电工程学院,广州 510430 
刘怡飞 广州铁路职业技术学院 机电工程学院,广州 510430 
代明江 广东省科学院新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州 510650 
李风 广东工业大学 材料与能源学院,广州 510006 
刘敏 广东省科学院新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州 510650 
AuthorInstitution
LU Jin-de School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China;The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Institute of New Materials, Guangdong Academy of Sciences, Guangzhou 510650, China 
WEI Chun-bei The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Institute of New Materials, Guangdong Academy of Sciences, Guangzhou 510650, China 
LIN Song-sheng The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Institute of New Materials, Guangdong Academy of Sciences, Guangzhou 510650, China 
ZHANG Jia-ping AECC Shenyang Liming Aero-engine Co., Ltd, Shenyang 110043, China 
LI Hao-yu AECC Shenyang Liming Aero-engine Co., Ltd, Shenyang 110043, China 
LI Zhu-jun School of Electromechanical Engineering, Guangzhou Railway Polytechnic, Guangzhou 510430, China 
LIU Yi-fei School of Electromechanical Engineering, Guangzhou Railway Polytechnic, Guangzhou 510430, China 
DAI Ming-jiang The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Institute of New Materials, Guangdong Academy of Sciences, Guangzhou 510650, China 
LI Feng School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, China 
LIU Min The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Institute of New Materials, Guangdong Academy of Sciences, Guangzhou 510650, China 
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中文摘要:
      目的 通过离子源复合磁控溅射技术,制备宽温域耐磨减摩性能良好的NiCrAlY/MoS2复合薄膜。方法 采用离子源复合磁控溅射技术制备了NiCrAlY/MoS2复合薄膜,研究不同MoS2掺杂量对薄膜结构、力学性能和不同温度氧化热处理后摩擦学性能的影响。采用能谱仪(EDS)、扫描电子显微镜(SEM)、X射线衍射仪(XRD)对薄膜元素含量、组织结构和相结构进行分析。通过显微硬度计、洛氏硬度计、球-盘式摩擦磨损试验机、3D轮廓仪及高温氧化试验,对复合薄膜硬度、膜/基结合力、摩擦磨损性能和抗氧化性能进行分析。结果 NiCrAlY及NiCrAlY/MoS2复合薄膜以柱状晶结构生长,物相结构主要由Ni3Al、Ni-Cr和MoS2组成。随着MoS2含量的增加,薄膜柱状晶尺寸增加,致密度下降,薄膜硬度从503HV逐渐降到336HV。复合膜具有良好的膜/基结合力,结合力达到HF1级水平。掺杂MoS2可以明显提高复合薄膜的摩擦学性能,当MoS2掺杂量达到48.1%~69.8%时,NiCrAlY/MoS2复合薄膜在室温下具有良好的耐磨减摩性能,其摩擦因数降低至0.038~0.09,磨损率比NiCrAlY薄膜降低1个数量级以上,达到2.14×10–6 mm3/(N.m)。对NiCrAlY和NiCrAlY-48.1%MoS2复合薄膜进行400 ℃和500 ℃高温氧化试验,复合薄膜氧化形成NiO、Al2O3、MoO3相,经过氧化后复合薄膜仍具有良好的耐磨性能,400 ℃氧化后复合薄膜磨损率降至1.41×10–6 mm3/(N.m)。结论 MoS2掺杂量对 NiCrAlY/MoS2复合薄膜结构和性能有重要影响,当MoS2原子数分数为48.1%时,复合薄膜在常温以及高温氧化后均具有良好的耐磨减摩性能。
英文摘要:
      The paper aims to prepare NiCrAlY/MoS2 composite films with good tribological properties in wide temperature range by ion source combined with magnetron sputtering method. The NiCrAlY/MoS2 composite films was prepared by ion source combined with magnetron sputtering method. The effects of MoS2 doping content on the film structure, mechanical properties, tribological properties and anti-oxidation properties of the composite films were studied. The element composition, microstructure and phase structure of the films were analyzed by EDS, SEM and XRD respectively. Micorhardness, adhesion strength, friction and wear performance and oxidation resistance of the composite films were analyzed by microhardness tester, Rockwell hardness tester, ball-on-disc friction and wear tester, 3D profilometer and high temperature oxidation test. The results showed that NiCrAlY films and NiCrAlY/MoS2 composite films grew in columnar crystal structure and the phase structure was mainly composed of Ni3Al, Ni-Cr and MoS2. With the increasing of MoS2 content, the columnar crystal size increased and the density of the films decreased, and the microhardness of the films gradually decreased from 503HV to 336HV. The composite films had good adhesion strength, which reached to HF1 level. Doping MoS2 could significantly improve the tribological performance of the composite film. When the MoS2 content reached 48.1at.%~69.8at.%, the NiCrAlY/MoS2 composite films showed good tribological properties with the friction coefficient of 0.038~0.09, and the wear rate of 2.14×10–6 mm3/(N.m), which was more than one order of magnitude lower than that of the NiCrAlY films. The high temperature oxidation tests of NiCrAlY and NiCrAlY-48.1at.% MoS2 composite films were carried out at 400 ℃ and 500 ℃. NiO, Al2O3 and MoO3 phases formed in the composite films after oxidation test. The composite films showed good tribological properties after oxidation test, and the wear rate of the composite films decreased to 1.41×10–6 mm3/(N.m) after oxidation at 400 ℃ for 2 h. The amount of MoS2 has an important impact on the structure and performance of the NiCrAlY/MoS2 composite films. The NiCrAlY/MoS2 composite films with MoS2 content of 48.1at.% possessed good tribological properties in air and after high temperature oxidation.
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