朱子俊,刘顺,韩冰,陈燕.超声振动复合研磨K9光学玻璃工艺研究[J].表面技术,2020,49(4):74-80.
ZHU Zi-jun,LIU Shun,HAN Bing,CHEN Yan.Study on Hybrid Technology of Ultrasonic Vibration Assisted Abrasive Lapping K9 Optical Glass[J].Surface Technology,2020,49(4):74-80 |
| 超声振动复合研磨K9光学玻璃工艺研究 |
| Study on Hybrid Technology of Ultrasonic Vibration Assisted Abrasive Lapping K9 Optical Glass |
| 投稿时间：2019-10-25 修订日期：2020-04-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2020.04.009 |
| 中文关键词: 超声振动复合研磨 响应面法 光学玻璃 法向压应力 表面粗糙度值 表面微观形貌 |
| 英文关键词:ultrasonic vibration compound lapping response surface method planar optical glass normal compressive stress surface roughness value surface micromorphology |
| 基金项目:国家自然科学基金（51775258）；辽宁省教育厅重点项目（2017LNZD02） |
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| Author | Institution |
| ZHU Zi-jun | School of Mechanical Engineering and Automation, University of Science and Technology Liaoning, Anshan 114051, China |
| LIU Shun | School of Mechanical Engineering and Automation, University of Science and Technology Liaoning, Anshan 114051, China |
| HAN Bing | School of Mechanical Engineering and Automation, University of Science and Technology Liaoning, Anshan 114051, China |
| CHEN Yan | School of Mechanical Engineering and Automation, University of Science and Technology Liaoning, Anshan 114051, China |
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| 中文摘要: |
| 目的 探究超声振动复合研磨对光学玻璃研磨可行性，通过响应面法寻求超声振动研磨最优的工艺参数组合。方法 在传统研磨装置基础上，添加超声振动装置、蠕动泵、旋转工作台构成超声振动复合研磨装置。添加轴向超声高频振动提高研磨效率，添加旋转工作台提高研磨均匀性，添加蠕动泵便于循环和更新研磨液。利用响应面法优化超声振动复合研磨加工中的主轴转速、振动频率、加工间隙三个变量参数，并进行实验研究，可得出两两变量关联度，从而得出研磨中影响最大的因素。结果 通过响应面优化后得到超声振动复合研磨最佳工艺参数为主轴转速1000 r/min、加工间隙 0.4 mm、振动频率 12 kHz，主轴转速和间隙参数对工件表面研磨加工的影响较大。经25 min研磨，无超声振动的传统研磨方法使表面粗糙度值Ra从0.3 μm下降到0.1 μm；增加超声振动复合研磨使表面粗糙度值Ra从0.3 μm下降到0.04 μm。结论 经超声振动复合研磨后，光学玻璃表面存在的凹坑、凸起均得到了有效去除，表面粗糙度值下降快，表面形貌均匀、平整。 |
| 英文摘要: |
| The work aims to investigate the feasibility of ultrasonic vibration hybrid lapping for optical glass, and seek the optimal combination of process parameters by ultrasonic vibration lapping through response surface method. Ultrasonic vibration, peristaltic pump and rotating table are added to the traditional lapping device to form an ultrasonic vibration hybrid lapping device. The addition of axial ultrasonic high frequency vibration improves the lapping efficiency; adding a rotating table to improve the lapping uniformity; adding a peristaltic pump facilitates circulation and renewal of the slurry. The response surface method is used to optimize the three variables of spindle speed, vibration frequency and machining gap in the ultrasonic vibration hybrid lapping process, and the experimental research can be carried out to obtain the correlation degree between the two variables, and the most influential factors in the lapping are obtained. The optimal process parameters of ultrasonic vibration hybrid lapping after response surface optimization are: spindle speed 1000 r/min, machining gap 0.4 mm, vibration frequency 12 kHz, spindle speed and clearance parameters, which have a great influence on the surface lapping process. After 25 min lapping, the conventional lapping method without ultrasonic vibration is used to grind, and the surface roughness Ra decreases from 0.3 μm to 0.1 μm. After the ultrasonic vibration hybrid lapping, the surface roughness Ra decreases from 0.3 μm to 0.04 μm. After ultrasonic vibration hybrid lapping, the pits and bulges on the surface of the optical glass are effectively removed, the surface roughness value decreases rapidly, and the surface morphology is uniform and flat. |
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