李文琦,张建波,李恺,马小军,罗炳池,蒋晓东,吴卫东,戴亚平.易碎Be靶丸表面精密抛光技术与理论分析[J].表面技术,2019,48(5):286-291.
LI Wen-qi,ZHANG Jian-bo,LI Kai,MA Xiao-jun,LUO Bing-chi,JIANG Xiao-dong,WU Wei-dong,DAI Ya-ping.Surface Precision Polishing Technique and Theory Analysis for Fragile Be Capsule[J].Surface Technology,2019,48(5):286-291
易碎Be靶丸表面精密抛光技术与理论分析
Surface Precision Polishing Technique and Theory Analysis for Fragile Be Capsule
投稿时间:2018-08-31  修订日期:2019-05-20
DOI:10.16490/j.cnki.issn.1001-3660.2019.05.040
中文关键词:  精密抛光  无规行走  表面粗糙度  铍靶丸
英文关键词:precision polishing  random walk  surface roughness  beryllium capsule
基金项目:国家自然科学基金(11805176);中物院超精密加工技术重点实验室基金(ZZ15011)
作者单位
李文琦 中国工程物理研究院 a.激光聚变研究中心,四川 绵阳 621900 
张建波 中国工程物理研究院 a.激光聚变研究中心,四川 绵阳 621900 
李恺 中国工程物理研究院 a.激光聚变研究中心,b.等离子体物理重点实验室,四川 绵阳 621900 
马小军 中国工程物理研究院 a.激光聚变研究中心,四川 绵阳 621900 
罗炳池 中国工程物理研究院 a.激光聚变研究中心,b.等离子体物理重点实验室,四川 绵阳 621900 
蒋晓东 中国工程物理研究院 a.激光聚变研究中心,四川 绵阳 621900 
吴卫东 中国工程物理研究院 a.激光聚变研究中心,b.等离子体物理重点实验室,四川 绵阳 621900 
戴亚平 中国工程物理研究院 a.激光聚变研究中心,四川 绵阳 621900 
AuthorInstitution
LI Wen-qi a.Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China 
ZHANG Jian-bo a.Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China 
LI Kai a.Research Center of Laser Fusion, b.Science and Technology on Plasma Physics Laboratory, China Academy of Engineering Physics, Mianyang 621900, China 
MA Xiao-jun a.Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China 
LUO Bing-chi a.Research Center of Laser Fusion, b.Science and Technology on Plasma Physics Laboratory, China Academy of Engineering Physics, Mianyang 621900, China 
JIANG Xiao-dong a.Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China 
WU Wei-dong a.Research Center of Laser Fusion, b.Science and Technology on Plasma Physics Laboratory, China Academy of Engineering Physics, Mianyang 621900, China 
DAI Ya-ping a.Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China 
摘要点击次数:
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中文摘要:
      目的 建立一种新的易碎空心微球抛光机模型,并研制出该样机,用于空心Be微球的精密抛光。方法 采用限位孔设计解决微球低应力夹持问题,添加不同数量的配重球,用于调整待抛球的滑动摩擦力大小和防止其飞出限位孔。上下盘偏心放置,实现微球无规运动。采用白光干涉仪分析抛光后Be微球的表面粗糙度。结果 抛光机模型计算表明,待抛球一直在做周期性的变速和变加速运动,其周期大小由上盘转动频率决定,变加速运动增加了微球的滑动摩擦成分,有利于提高微球抛光效率。此外,待抛球表面抛光轨迹呈现无规行走,这有利于抛光的均匀性。使用该原理抛光机,在24 h内能够将直径1.2 mm、均方根表面粗糙度510 nm的易碎铍(Be)靶丸抛光至85 nm。结论 理论和实验共同验证了易碎微球抛光机模型的合理性和可行性,上下盘放置方式、限位孔大小设计和配重球数量等关系着易碎微球的抛光均匀性和抛光效率。
英文摘要:
      To establish a new model of polishing machine for friable hollow capsule (invention patent ZL201510335040.6), and develop a prototype for the precise polishing of hollow Be capsules. The restriction hole design was used to solve the problem of low stress clamping of sphere. Different numbers of counterweight spheres were added to adjust the sliding friction force and prevent the spheres from flying out of the restriction hole. The upper and lower grinding pans were placed eccentrically to achieve random movement of the spheres. The surface roughness of the polished Be capsules was analyzed by white light interferometer. The model calculation shows that the unpolished spheres always roll periodically in the mode of variable speed and variable acceleration. The periodicity is determined by the rotation frequency of the top pan. The spheres of variable acceleration motion increase the sliding friction components and are beneficial to improving the polishing efficiency. In addition, the surface polishing trajectory presents random walk, which can ensure the polishing uniformity. The fragile beryllium (Be) capsule with a diameter of 1.2 mm and a root mean square surface roughness of 510 nm can be polished to 85 nm in 24 hours by this polishing machine. The rationality and feasibility of the fragile sphere polishing machine model are verified by both theory and experiment. The polishing uniformity and polishing efficiency of fragile spheres are closely related to the placement mode of upper and lower grinding pans, the size of restriction hole and the number of counterweight spheres.
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