朱军亮,王更柱,解志文,陈添,宋晓航,高旭,于晓光,宋华.Ti-Al-N 涂层的组织结构与摩擦学性能[J].表面技术,2015,44(4):54-59.
ZHU Jun-liang,WANG Geng-zhu,XIE Zhi-wen,CHEN Tian,SONG Xiao-hang,GAO Xu,YU Xiao-guang,SONG Hua.Microstructure and Tribological Properties of Ti-Al-N Coatings[J].Surface Technology,2015,44(4):54-59 |
| Ti-Al-N 涂层的组织结构与摩擦学性能 |
| Microstructure and Tribological Properties of Ti-Al-N Coatings |
| 投稿时间：2015-01-28 修订日期：2015-04-20 |
| DOI：10.16490/j.cnki.issn.1001-3660.2015.04.010 |
| 中文关键词: 多元等离子体注入与沉积 Ti-Al-N 涂层 组织结构 摩擦磨损 |
| 英文关键词:multi-plasma immersion ion implantation and deposition Ti-Al-N coating microstructure friction and wear |
| 基金项目:国家自然科学基金(51401201);中国科学院西部博士项目(Y32Z010F10);上海航天技术研究院基金;重庆市前沿与应用基础项目(cstc2014jcyjA50009) |
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| Author | Institution |
| ZHU Jun-liang | Chongqing Nankai Secondary School, Chongqing 400030, China |
| WANG Geng-zhu | University of Science and Technology Liaoning, Anshan 114051, China |
| XIE Zhi-wen | 1. University of Science and Technology Liaoning, Anshan 114051, China; 2. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 401122, China; |
| CHEN Tian | Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 401122, China |
| SONG Xiao-hang | Shanghai Aerospace Equipments Manufacturer, Shanghai 200245, China |
| GAO Xu | University of Science and Technology Liaoning, Anshan 114051, China |
| YU Xiao-guang | University of Science and Technology Liaoning, Anshan 114051, China |
| SONG Hua | University of Science and Technology Liaoning, Anshan 114051, China |
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| 中文摘要: |
| 目的 采用多元等离子体注入与沉积(MPIIID)技术制备 Ti-Al-N 涂层,系统研究涂层的微观组织结构、力学性能与摩擦学特性。 方法 借助 XRD,XPS,SEM 和 TEM 等，观察分析Ti-Al-N 涂层的微观组织结构与物相组成,采用纳米压入试验仪、布氏硬度试验仪、摩擦磨损试验仪和激光共聚焦显微镜等测试分析 Ti-Al-N 涂层的力学性能、膜基结合力和摩擦磨损性能。 结果 Ti-Al-N 涂层表现出较高的膜-基结合强度。 Al 元素掺杂诱发 Ti-Al-N 涂层发生严重晶格畸变。 当 Al 原子数分数为 6. 18% 时,Ti-Al-N 涂层以 c-TiAlN 相结构为主,表现出超高硬度(达到 39. 83 GPa);随着 Al 元素含量增加,涂层中的软质h-TiAlN相结构增多,硬度随之下降。 摩擦试验结果表明,低 Al 含量 Ti-Al-N 涂层的抗磨损能力良好,其主要磨损机制为磨粒磨损;高 Al 含量 Ti-Al-N 涂层的抗磨损能力较差,其主要磨损机制倾向粘着磨损。结论 MPIIID 技术成功实现了 Ti-Al-N 涂层的低温制备与成分调控,低 Al 含量的 Ti-Al-N 涂层具有优良的力学性能和优异的抗磨损能力。 |
| 英文摘要: |
| Objective To investigate the microstructural, mechanical and tribological properties of the Ti-Al-N coatings synthesized by multi-plasma immersion ion implantation and deposition (MPIIID). Methods The microstructure and phase composition of the as-deposited coatings were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The mechanical, bonding and tribological properties of the as-deposited coatings were investigated using nano-indentation technology, Brinell hardness tester, friction and laser scanning confocal microscope. Results Ti-Al-N coatings showed high adhesion strength with the substrate. Al incorporation induced a serious lattice distortion. Ti-Al-N coating with an Al content of 6. 18% was mainly composed of c-TiAlN phase and possessed a super hardness of about 39. 83 GPa. However, the soft h-TiAlN phase in the Ti-Al-N coating increased with the increasing Al content, which led to the continuous reduction in hardness of the Ti-Al-N coatings. Tribological test results showed that the Ti-Al-N coating with a low Al content exhibited excellent wear resistance and its wear mechanisms was defined as abrasive wear. However, the Ti-Al-N coating with a high Al content exhibited poor wear resistance and its wear mechanisms was defined as adhesive wear. Conclusion The multi-plasma immersion ion implantation and deposition (MPIIID) technique successfully realized the low temperature deposition and composition control of the Ti-Al-N coatings. Ti-Al-N coating with low Al content exhibited excellent mechanical and antiwear properties. |
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