李栋,孟凡平,薛群基,黄峰.VAlSiN 硬质涂层的结构与机械性能[J].表面技术,2014,43(3):59-63.
LI Dong,MENG Fan-ping,XUE Qun-ji,HUANG Feng.Microstructure and Mechanical Properties of the VAlSiN Hard Coatings[J].Surface Technology,2014,43(3):59-63 |
| VAlSiN 硬质涂层的结构与机械性能 |
| Microstructure and Mechanical Properties of the VAlSiN Hard Coatings |
| 投稿时间：2014-03-19 修订日期：2014-04-04 |
| DOI： |
| 中文关键词: VAlSiN 硬质涂层 Si 掺入 机械性能 |
| 英文关键词:VAlSiN hard coatings silicon addition mechanical properties |
| 基金项目:中国科学院“ 百人计划" |
| 作者 | 单位 |
| 李栋 | 中国科学院海洋材料与应用技术重点实验室, 浙江 宁波 315201;浙江省海洋与防护技术重点实验室, 浙江 宁波 315201;中国科学院宁波材料技术与工程研究所, 浙江 宁波 315201 |
| 孟凡平 | 中国科学院海洋材料与应用技术重点实验室, 浙江 宁波 315201;浙江省海洋与防护技术重点实验室, 浙江 宁波 315201;中国科学院宁波材料技术与工程研究所, 浙江 宁波 315201 |
| 薛群基 | 中国科学院海洋材料与应用技术重点实验室, 浙江 宁波 315201;浙江省海洋与防护技术重点实验室, 浙江 宁波 315201;中国科学院宁波材料技术与工程研究所, 浙江 宁波 315201 |
| 黄峰 | 中国科学院海洋材料与应用技术重点实验室, 浙江 宁波 315201;浙江省海洋与防护技术重点实验室, 浙江 宁波 315201;中国科学院宁波材料技术与工程研究所, 浙江 宁波 315201 |
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| Author | Institution |
| LI Dong | Key Laboratory of Marine Materials and Related Technologies, Chinese Academy of Sciences, Ningbo 315201, China;Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo 315201, China;Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| MENG Fan-ping | Key Laboratory of Marine Materials and Related Technologies, Chinese Academy of Sciences, Ningbo 315201, China;Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo 315201, China;Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| XUE Qun-ji | Key Laboratory of Marine Materials and Related Technologies, Chinese Academy of Sciences, Ningbo 315201, China;Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo 315201, China;Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
| HUANG Feng | Key Laboratory of Marine Materials and Related Technologies, Chinese Academy of Sciences, Ningbo 315201, China;Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo 315201, China;Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China |
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| 中文摘要: |
| 目的 研究 Si 的掺入对 VAlN 硬质涂层机械性能的影响行为。 方法 利用双靶( V50 Al50 靶与Si 靶) 磁控溅射沉积技术,保持 V50 Al50 靶的功率为一定值,通过控制 Si 靶的功率,获得 Si 含量不同的VAlSiN 硬质涂层,分析涂层的成分、相组成、硬度及耐磨损性能。 结果 Si 在涂层中以 Si3N4 非晶相存在,Si3N4 起到细化晶粒的作用,少量 Si 的掺入可使涂层的硬度与耐磨性能得到提升。 但当 Si 大量掺入后,Si3N4 非晶相成为涂层中的主相,导致涂层的硬度与耐磨性能出现下降。 结论 少量 Si 的掺入有益于 VAlN 涂层机械性能的提升。 |
| 英文摘要: |
| Objective To study the effect of silicon addition on mechanical properties of the VAlN hard coatings. Methods Using the two-target ( V50Al50 target and Si target) magnetron co-sputtering machine to deposit the VAlSiN hard coatings. The silicon content was adjusted by the power applied to the silicon target. Results The silicon added in the coatings was all in the Si3N4 phase, which had a grain refining effect. When the silicon content was low, the mechanical properties ( both hardness and wear rate) of the coatings were improved. However, once the silicon content was higher than that, Si3N4 became the main phase of the coatings, and the mechanical properties of the coatings turned worse. Conclusion Adding a little silicon to the VAlN hard coatings could improve their mechanical properties. |
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