熊晓晨,燕怒,韩晓琪.轴承钢磁控溅射TiN涂层工艺参数对其性能的影响[J].表面技术,2014,43(1):67-70,89.
XIONG Xiao-chen,YAN Nu,HAN Xiao-qi.Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel[J].Surface Technology,2014,43(1):67-70,89
轴承钢磁控溅射TiN涂层工艺参数对其性能的影响
Influence of Magnetron Sputtering Parameters on Surface Properties of TiN-coated Bearing Steel
投稿时间:2013-10-29  修订日期:2013-11-02
DOI:
中文关键词:  磁控溅射  TiN 涂层  轴承钢  硬度  耐磨性
英文关键词:magnetron sputtering  TiN film  bearing Steel  hardness  wearing resistance
基金项目:国家自然科学基金(51175298) ;教育部留学回国人员科研启动基金( 教外司留[2011]15) ;三峡大学研究生创新基金(2013CX031)
作者单位
熊晓晨 三峡大学 水电机械设备设计与维护湖北省重点实验室, 湖北 宜昌 443002;三峡区域能源装备三峡大学协同创新中心, 湖北 宜昌 443002 
燕怒 三峡大学 水电机械设备设计与维护湖北省重点实验室, 湖北 宜昌 443002;三峡区域能源装备三峡大学协同创新中心, 湖北 宜昌 443002 
韩晓琪 三峡大学 水电机械设备设计与维护湖北省重点实验室, 湖北 宜昌 443002;三峡区域能源装备三峡大学协同创新中心, 湖北 宜昌 443002 
AuthorInstitution
XIONG Xiao-chen Hubei Key Laboratory of Hydroelectric Machinery Design & Maintenance, China Three Gorges University,Yichang 443002, China; Collaborative Innovation Center for Energy Equipment of Three Gorges Region, China Three Gorges University, Yichang 443002, China 
YAN Nu Hubei Key Laboratory of Hydroelectric Machinery Design & Maintenance, China Three Gorges University,Yichang 443002, China; Collaborative Innovation Center for Energy Equipment of Three Gorges Region, China Three Gorges University, Yichang 443002, China 
HAN Xiao-qi Hubei Key Laboratory of Hydroelectric Machinery Design & Maintenance, China Three Gorges University,Yichang 443002, China; Collaborative Innovation Center for Energy Equipment of Three Gorges Region, China Three Gorges University, Yichang 443002, China 
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中文摘要:
      目的 研究磁控溅射工艺参数,包括溅射功率、溅射时间,对 TiN 涂层轴承钢表面性能的影响。方法 采用磁控溅射技术,固定其他工艺参数不变,分别以溅射功率和溅射时间为变量,在轴承钢 GCr15表面镀制 TiN 膜层,并测定硬度,进行摩擦磨损试验。 结果 固定溅射功率为 200 W, 随镀膜时间的延长,硬度和耐磨性呈递减趋势, 镀膜时间为 5 ~ 10 min 时, 硬度值达 345 . 23 ~ 353 . 88 HV, 摩擦磨损量为2 . 9 ~ 3 . 4 mg。 固定镀膜时间为 30 min,随着溅射功率从 70 W 增大至 200 W,硬度与耐磨性也呈递减趋势,溅射功率为 100 W 时,硬度值可达 577 . 91 HV,摩擦磨损量为 0 . 9 mg。 结论 溅射功率的影响占主导地位,且溅射功率不宜偏高。 欲提升材料表面硬度和耐磨性能,溅射功率取 100 W,镀膜时间取 30 min 最为适宜。
英文摘要:
      Objective To investigate the influence of magnetron sputtering parameters including sputtering power and sputtering time on surface properties. Methods The hardness tests and friction tests were carried out for TiN-coated bearing steel. Results Tests showed that hardness and wear resistance declined with the increase of deposition time, and when the sputtering power was 200 W, with a deposition time of 5 ~ 10 minutes, the hardness value reached 345. 23 ~ 353. 88 HV, and the wearing capacity was 2. 9 ~ 3. 4 mg; The hardness and wear resistance declined with the increase of sputtering power in the range of 70 ~ 200 W, the hardness value reached up to 577. 91 HV, and the wearing capacity was 0. 9 mg, when the deposition time was 30 minutes. Conclusion It was concluded from the testing results that the sputtering power was the predominant influencing factor. In order to improve the surface friction properties and hardness for bearing steels, the sputtering power should not be too high, and a sputteringpower of 100 W and a deposition time of 30 minutes was the most suitable sputtering condition.
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