孙彩云,何庆兵,李立,张隆平,易同斌,吴护林.化学气相沉积法制备 TiB2涂层工艺的研究[J].表面技术,2013,42(1):81-84.
SUN Cai-yun,HE Qing-bing,LI Li,ZHANG Long-ping,YI Tong-bin,WU Hu-lin.Study on Chemical Vapor Deposition Process for TiB2Coating[J].Surface Technology,2013,42(1):81-84 |
| 化学气相沉积法制备 TiB2涂层工艺的研究 |
| Study on Chemical Vapor Deposition Process for TiB2Coating |
| 投稿时间：2012-08-28 修订日期：2012-10-26 |
| DOI： |
| 中文关键词: TiB2 涂层 显微结构 沉积速率 |
| 英文关键词:TiB2coating microstructure deposition rate |
| 基金项目: |
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| Author | Institution |
| SUN Cai-yun | No. 59 institute of china ordnance industry, Chongqing 400039 , China |
| HE Qing-bing | No. 59 institute of china ordnance industry, Chongqing 400039 , China |
| LI Li | No. 59 institute of china ordnance industry, Chongqing 400039 , China |
| ZHANG Long-ping | No. 59 institute of china ordnance industry, Chongqing 400039 , China |
| YI Tong-bin | No. 59 institute of china ordnance industry, Chongqing 400039 , China |
| WU Hu-lin | No. 59 institute of china ordnance industry, Chongqing 400039 , China |
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| 中文摘要: |
| 以 TiCl4-BCl3-H2 为反应体系,采用化学气相沉积技术,在低碳钢和石墨表面成功沉积了 TiB2 涂层,并研究了沉积温度、气体流量和基体类型对涂层显微结构和显微硬度的影响。 结果表明:沉积温度较高时,低碳钢表面的 TiB2 涂层晶粒取向随机,结晶度较好,沉积温度较低时则呈柱状晶,晶粒取向随机时的显微硬度高于呈柱状晶时的显微硬度;基体类型对涂层沉积速率的影响显著,在 980 ℃ ,BCl3 流量 100 mL / min 的条件下沉积 1h,低碳钢表面的涂层厚度为 20 μm,而石墨表面的涂层厚度为 44 ~ 70 μm。 |
| 英文摘要: |
| Titanium diboride ( TiB2) coating was successfully deposited on low carbon steel and graphite substrate respectively depending on TiCl4-BCl3-H2reactive system by chemical vapor deposition technology. The effect of deposition temperature , gas flow rate and substrate material on microstructure and microhardness of TiB2coating was researched. The result shows that , TiB2coating, which was deposited on low carbon steel substrate, exhibit random grains and better crystallization at higher temperature, columnar grains at lower temperature and lower BCl3gas flow rate characterized by XRD patterns and SEM observation . Microhardness test indicates that the microhardness value of TiB2coating of random grain is higher than that of oriented columnar grains. The substrate material affects the deposition rate of TiB2coating strongly. Deposited 1 h at 100 mL / min BCl3and 980 ℃ , the thickness of TiB2coating attains 44 μm ~ 70 μm at graphite surface whereas 20 μm at low carbon steel . |
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