廉冰娴,许兵.阳极氧化制备氧化钛薄膜原理剖析[J].表面技术,2010,39(4):45-46,82.
LIAN Bing-xian,XU Bing.Principle Analyses of Preparation Oxide Titanium Film Using Anode Oxidation[J].Surface Technology,2010,39(4):45-46,82 |
| 阳极氧化制备氧化钛薄膜原理剖析 |
| Principle Analyses of Preparation Oxide Titanium Film Using Anode Oxidation |
| 投稿时间：2009-11-21 修订日期：2010-08-10 |
| DOI： |
| 中文关键词: 阳极氧化 氧化薄膜 厚度 原理剖析 模拟 |
| 英文关键词:anode oxidation oxide film thickness principle analysis simulate |
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| 中文摘要: |
| 通过实验制备了几种不同厚度的氧化钛薄膜,从膜的形成机理及氧化着色原理,得出薄膜厚度随电压增加而增加,且其增加速率大致在2.5 nm/V。重点剖析了氧化钛薄膜的氧化着色原理,并通过实验模拟分析了氧化膜形成机理,为后续研究提供了参考。 |
| 英文摘要: |
| According to the experiment, several kinds of different thickness oxidize titanium film have been made. With the increasing of voltage, the film thickness also increases at a rate of 2.5 nm/V basically. In addition, the paper analyses oxidize-color principle of oxide titanium film priority using experiment and the form-mechanism of oxide titanium film simulately, which provides a reference for follow-up study. |
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